Solid immersion lens and microscope

Abstract

A solid immersion lens (1) has a spherical section (2) and a bottom surface section (3). The bottom surface section (3) is closely attached to the substrate (10) of a semiconductor device which is an observation subject. The bottom surface section (3) of this solid immersion lens (1) is cylindrically formed, thereby providing a solid immersion lens capable of being easily separated from the observation subject after observation and of passing a light flux having high NA during observation; and a microscope using the same.

Description

technical field [0001] The present invention relates to a solid immersion lens and a microscope used in electronic device inspection methods and the like for failure analysis and reliability evaluation of electronic devices. Background technique [0002] The method used in the electronic device inspection is to observe the electronic device as a sample with a microscope or the like. Existing devices for inspecting electronic devices include radiation microscopes and IR-OBIRCH devices (see Japanese Patent Application Laid-Open No. 7-190946 and Japanese Patent Laid-Open No. 6-300824). However, in recent years, with the miniaturization of electronic devices to be inspected, in conventional inspection devices using visible light, infrared light or heat rays, the analysis of fine structures is difficult due to the limitation caused by the diffraction limit of the optical system. become difficult. [0003] Therefore, when analyzing the microstructure of such an electronic device...

AI Technical Summary

Problems solved by technology

[0004] As described above, in the high-resolution observation method using an electron microscope after inspection using light, the inspection of electronic devices requires a lot of labor and time because the preparation and installation of electronic devices to be inspected are very complicated. become a problem

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