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Angular velocity detector having inertial mass oscillating in rotational direction

A technology of inertial mass and mass block, applied in gyro effect for speed measurement, speed/acceleration/shock measurement, steering sensing equipment, etc., can solve the problem that it is difficult to make the drive beam 40 with precise dimensions

Inactive Publication Date: 2010-05-26
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Clearly, it is difficult to make the precise dimensions of the drive beam 40 to have the desired resonant frequency in both directions

Method used

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  • Angular velocity detector having inertial mass oscillating in rotational direction
  • Angular velocity detector having inertial mass oscillating in rotational direction
  • Angular velocity detector having inertial mass oscillating in rotational direction

Examples

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Embodiment Construction

[0021] The first embodiment of the present invention is as Figure 1A with 1B As shown, the top view and cross-sectional view of the angular velocity detector 100 of the present invention are respectively shown. Figure 1A The crosshatching lines in do not refer to the cross section but represent the top surface of each component. In order to clearly distinguish the inertial mass 30 from the drive electrodes 60 , 61 , the former is marked with hatching, and the latter is represented with dots.

[0022] The angular velocity detector 100 is made of a three-layer board, which consists of a substrate 10, a sacrificial layer 11 (such as a silicon dioxide layer) and a semiconductor layer 12 (such as an epitaxial polysilicon layer (epitaxial poly-silicon layer)). The above layers are stacked in this order. Detector 100 is fabricated by known semiconductor processing techniques. Part of the sacrificial layer 11 is removed by etching to separate the inertial mass 30 from the base bod...

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Abstract

An angular velocity detector includes a disk-shaped inertial mass supported on a substrate via driving beams and a second mass connected to the inertial mass via detecting beams. The inertial mass isoscillated in its rotational direction around a center axis (z) by an electrostatic force. When an angular velocity around a detection axis (x), which is perpendicular to the center axis (z), is imposed on the second mass while the inertial mass is oscillating, the second mass displaces in the direction parallel to the center axis (z). A capacitance between the second mass and the substrate changes according to the displacement of the second mass. The angular velocity is detected based on the changes in the capacitance. Since the driving beams allow the inertial mass to oscillate only in the rotational direction, the driving beams can be easily designed and manufactured.

Description

technical field [0001] The invention relates to an angular velocity detector with an inertial mass oscillating in its direction of rotation. Background technique [0002] This type of angular velocity detector is used to detect the angular velocity applied on the detection axis, wherein the detection axis is perpendicular to the rotation axis of the inertial mass. As the inertial mass oscillates about its center of rotation, the inertial mass is displaced due to the Coriolis force exerted on the inertial mass. An example of this type of angular velocity detector is disclosed in JP-A-2001-99855. [0003] In another type of angular velocity detector that utilizes the Coriolis force, the inertial mass vibrates in a straight line. In this type of angular velocity detector, the inertial mass is displaced due to angular velocity in a direction perpendicular to the straight line along which the inertial mass vibrates. However, in this type of detector, when a linear acceleration...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P9/04G01C19/56G01C19/5712
CPCG01C19/5719G01C19/5712G01P3/44
Inventor 樋口祐史
Owner DENSO CORP
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