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Resonant structure humidity sensor

A technology of humidity sensor and resonant structure, which is applied in the field of resonant structure humidity sensor, can solve the problems of temperature drift, large capacitance and related circuits, and unsuitable application of humidity sensor.

Inactive Publication Date: 2012-01-11
AVAGO TECH WIRELESS IP SINGAPORE PTE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, humidity sensors using humidity-sensitive capacitors may not be suitable for many applications
For example, moisture-sensitive capacitors and associated circuitry may be too bulky for many applications
Also, existing humidity sensors can be affected by temperature drift

Method used

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  • Resonant structure humidity sensor
  • Resonant structure humidity sensor
  • Resonant structure humidity sensor

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Embodiment Construction

[0012] figure 1 A humidity sensor 10 according to the invention is shown. The humidity sensor 10 includes a resonant structure 12 and a structure 14 for varying the resonant frequency of the resonant structure 12 in response to changes in humidity. In one embodiment, resonant structure 12 and structure 14 are disposed on substrate 16 .

[0013] The mass of structure 14 changes in response to humidity. The mass of structure 14 provides a mass load on resonant structure 12 that affects the resonant frequency of resonant structure 12 . Increasing the mass of structure 14 lowers the resonant frequency of resonant structure 12 and reducing the mass of structure 14 increases the resonant frequency of resonant structure 12 . As a result, the resonant frequency of resonant structure 12 may be indicative of humidity.

[0014] In one embodiment, structure 14 includes a water permeable material. Increased humidity causes structure 14 to absorb more water and increase its mass, while...

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Abstract

A humidity sensor that includes a resonant structure and a structure for altering a resonant frequency of the resonant structure in response to a change in humidity. The structures of a humidity sensor according to the present teachings may be formed in relatively small form factors and are well suited to remote applications and providing mechanisms for compensating for temperature drift.

Description

technical field [0001] The present invention relates to a resonance structure humidity sensor. Background technique [0002] Humidity sensors can be used in a wide variety of applications. Exemplary applications of humidity sensors include heating and air conditioning systems. In addition, humidity sensors can also be used in process control systems, weather stations, agricultural environments, and more. [0003] The humidity sensor may include a humidity sensitive capacitor whose capacitance changes in response to changes in humidity. For example, a moisture-sensitive capacitor may include a water-permeable dielectric material sandwiched between two metal plates. The metal plate may have holes that allow water to reach the dielectric material. Increased humidity can cause the dielectric material to absorb water. Water absorbed by the dielectric material increases the dielectric constant of the dielectric material, which increases the capacitance of the capacitor. [0...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N19/10
CPCG01N5/025G01N27/223
Inventor 威廉·R·小托特纳理查德·C·鲁比斯托尔斯·T·霍恩安妮特·C·格罗特马克·A·安奎茨格雷厄姆·弗劳尔约翰·斯蒂夫·考弗尔
Owner AVAGO TECH WIRELESS IP SINGAPORE PTE