Resonant structure humidity sensor
A technology of humidity sensor and resonant structure, which is applied in the field of resonant structure humidity sensor, can solve the problems of temperature drift, large capacitance and related circuits, and unsuitable application of humidity sensor.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0012] figure 1 A humidity sensor 10 according to the invention is shown. The humidity sensor 10 includes a resonant structure 12 and a structure 14 for varying the resonant frequency of the resonant structure 12 in response to changes in humidity. In one embodiment, resonant structure 12 and structure 14 are disposed on substrate 16 .
[0013] The mass of structure 14 changes in response to humidity. The mass of structure 14 provides a mass load on resonant structure 12 that affects the resonant frequency of resonant structure 12 . Increasing the mass of structure 14 lowers the resonant frequency of resonant structure 12 and reducing the mass of structure 14 increases the resonant frequency of resonant structure 12 . As a result, the resonant frequency of resonant structure 12 may be indicative of humidity.
[0014] In one embodiment, structure 14 includes a water permeable material. Increased humidity causes structure 14 to absorb more water and increase its mass, while...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 