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Evaporator device with container for containing being evaporated material

An evaporator and container technology, which is applied in the field of evaporator devices to achieve the effects of less pollution and reduced oil loss

Inactive Publication Date: 2007-05-02
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The invention solves the problem of providing an evaporator device for evaporating oil comprising sealing means at the nozzle

Method used

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  • Evaporator device with container for containing being evaporated material
  • Evaporator device with container for containing being evaporated material
  • Evaporator device with container for containing being evaporated material

Examples

Experimental program
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Embodiment Construction

[0023] Figure 1 shows an exploded view of an evaporator arrangement according to the invention. The evaporator device 1 comprises an oil container 2 in which a heating rod 3 is positioned. Above the oil container 2 there is a valve plate 4 with three longitudinal holes 5 , 6 , 7 . In the longitudinal holes 5 and 7 are positioned heating rods 8 , 9 , and in the longitudinal hole 6 a push rod valve 10 is positioned. The heating rods 8 , 9 or the push rod valve 10 are shown on the outside of the valve plate 4 in FIG. 1 . A nozzle plate 11 is positioned above the valve plate 4, and a trimming plate 12 rests on the nozzle plate 11. 14 denotes a stepping motor, which drives a first runner 15, and the first runner 15 passes through A connecting element 16 , such as a chain or a V-belt, drives a second runner 17 . Here, the preferred embodiment is a chain. The second rotating wheel 17 is connected to one end of the push rod valve 10 , which can be rotated about its longitudinal ax...

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PUM

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Abstract

The invention relates to an evaporator device with a receptacle for holding material to be evaporated. With this evaporator device an oil film can be applied onto specific sites of a sheet to be coated, this sheet being coated with aluminum or zinc in a further step. At the sites at which the oil film is located, no aluminum or zinc is deposited. With the aid of a rod valve, precise application of the oil onto the sheet is ensured. This rod valve is driven by a stepping motor, which can release percentage fractions of oil vapor.

Description

technical field [0001] The invention relates to an evaporator arrangement according to the preamble of claim 1 . Background technique [0002] For example, oil evaporators are required for the production of capacitors. Here, the dielectric, for example a composite sheet, has a metal layer. In order to avoid negative consequences of capacitance after electrical insulation breakdown, several metal-free strips are provided on the composite sheet. These metal-free strips are produced to coat a film of oil at designated locations on the synthetic sheet. Metal vapor, preferably aluminum vapor, which is subsequently applied to the composite sheet cannot adhere to those locations where the oil film is located. [0003] In JP 10008241 an evaporator arrangement with nozzles is disclosed. In this document, the substance to be evaporated is evaporated in a crucible, wherein the substance exits through a nozzle and moves in the direction towards the substrate, on which the substance ...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/14
Inventor 卡尔－海因里希·文克
Owner APPLIED MATERIALS INC