Shape memory alloy with ductility and a process of making the same
a memory alloy and ductility technology, applied in vacuum evaporation coatings, sputtering coatings, coatings, etc., can solve the problems of ti--ni alloys with excessive ti, poor mechanical properties, brittleness, etc., and severely deteriorate the mechanical properties of the material
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[0027] Using a target of a Ti--Ni alloy, an amorphous thin film consisting of a Ti-48.3 atomic % Ni alloy with the thickness of about 7 .mu.m was formed on a glass substrate. The alloy thin film was annealed within a temperature range of 600.about.900K and then cooled down to room temperature slowly. A structure of the alloy thin film after annealing was observed by an electron microscope. FIG. 1 and FIGS. 2a and 2b are photos of a typical structure. In the alloy thin film subjected to annealing at 773K for 5 minutes, as shown in FIG. 1, a slight amount of oxides are confirmed at grain boundaries, but Ti.sub.2Ni phases are scarcely precipitated. The same structure as this is confirmed in the alloy thin film annealed at 873K for 3 minutes, as shown in FIG. 2a. On the contrary, in an alloy thin film subjected to annealing at 873K for an hour, as shown in FIG. 2b, precipitate of wedged-shaped Ti.sub.2Ni phases is observed at grain boundaries, especially at triple points of grain bounda...
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