Acceleration sensor
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first embodiment
[0063] (First Embodiment)
[0064] An acceleration sensor according to a first embodiment of the present invention has an arrangement, in which the detection electrode mentioned before is divided into two parts arranged side by side in the main-axis direction X in which acceleration α is applied in order to further improve sensitivity and reduce noise.
[0065]FIGS. 3A, 3B and 3C illustrate an acceleration sensor according to the first embodiment of the present invention. As shown in FIG. 3A, the detection electrode 11 is divided into two detection electrodes 11-1 and 11-2 arranged side by side in the width direction of the LNX-cut plate 1. As shown in FIG. 3B, electric signals respectively picked up via the detection electrodes 11-1 and 11-2 caused by acceleration α applied in the main-axis direction X are 180 degrees out of phase. As to the Y-axis direction perpendicular to the main-axis direction X, the electric signals respectively picked up via the detection electrodes 11-1 and 11-2...
second embodiment
[0066] (Second Embodiment)
[0067] An acceleration sensor according to a second embodiment of the present invention has an arrangement, in which the detection electrode mentioned before is divided into two parts arranged side by side in a Z-axis direction perpendicular to the direction in which acceleration α is applied in order to reduce the production cost.
[0068]FIG. 4 is a diagram of the acceleration sensor according to the second embodiment of the present invention. The detection electrode 11 is divided into parts 11-3 and 11-4 arranged side by side in the longitudinal direction Z of the LNX-cut plate perpendicular to the direction in which acceleration α is applied.
[0069] The detection electrodes 11-3 and 11-4 are arranged in parallel with the X-axis direction in which acceleration α is applied. Hence, it is possible to easily divide the detection electrode 11 into the parts 11-3 and 11-4 by batch processing at the time of dividing the LNX-cut plate into the individual LNX-cut ...
third embodiment
[0070] (Third Embodiment)
[0071] An acceleration sensor according to a third embodiment of the present invention has an arrangement in which the LNX-cut plate is supported in a position which does not include the center of gravity thereof.
[0072] Referring to FIG. 5A, the supporting area S is located in an end part of the LNX-cut plate 1. Thus, the effective length L of the weight part W can be lengthened, so that acceleration α can be sensed with higher sensitivity.
[0073]FIG. 5B is a graph showing a relationship between the supporting area S and normalized sensor output. The sensitivity depends on the supporting area S. More particularly, the sensitivity becomes worse as a supporting member 2 shown in FIG. 5A is positioned so as to become closer to the center of the LNX-cut plate 1. A normalized sensor output of 1 is defined when the supporting area S is located in the end part of the LNX-cut plate 1. The horizontal axis of the graph of FIG. 5B denotes the normalized supporting are...
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