Hybrid light modulator

Inactive Publication Date: 2005-11-03
SAMSUNG ELECTRO MECHANICS CO LTD
View PDF3 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0036] Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide a hybrid light modulator which includes ribbons having uneven upper surfaces, so that incident light is diffracted by the uneven upper surfaces of the ribbons from an early light receiving stage, but not by controlling the height difference between moving ribbons, thus realizing miniaturization and high integration of the hybrid light modulator.

Problems solved by technology

It has been proved that sticking between the ribbon 18 and substrate 16 is a gross problem of such a device during a wet process applied to form a space under the ribbon 18 and during operation of the modulator 10.
The groups alternately apply a voltage to the substrate, resulting in deformation of the elements.
However, the light modulator which is manufactured by Silicon Light Machines Inc. and adopts an electrostatic method to control the position of a micromirror is disadvantageous in that an operation voltage is relatively high (usually 30 V or so) and a correlation between the applied voltage and displacement is nonlinear, and thus, reliability is poor in the course of controlling light.
However, the conventional light modulators disclosed in Patents filed by Bloom et al. and Samsung electro-mechanics Co., Ltd., have reached the limit in miniaturization.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Hybrid light modulator
  • Hybrid light modulator
  • Hybrid light modulator

Examples

Experimental program
Comparison scheme
Effect test

first embodiment

[0069]FIG. 14a is a perspective view showing an element 1410a of a recess-type hybrid thin-film piezoelectric light modulator, according to the present invention. Referring to FIG. 14a, the element 1410a includes a plurality of protrusions 1420a1, 1420a2, 1420a3, 1420a4 and 1420a5 which is placed on a micromirror layer 1415a of the element 1410a to reflect and diffract incident light. Each of the protrusions 1420a1, 1420a2, 1420a3, 1420a4 and 1420a5 has a rectangular column shape (ribbon shape). The protrusions 1420a1, 1420a2, 1420a3, 1420a4 and 1420a5 are arranged along a longitudinal axis of the element 1410a, passing over the recess, to be spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 1420a1, 1420a2, 1420a3, 1420a4, 1420a5). Each protrusion 1420a1, 1420a2, 1420a3, 1420a4, 1420a5 includes a support layer 1421a1, 1421a2, 1421a3, 1421a4, 1421a5 which is attached at a lower surface thereof to an upper surface ...

second embodiment

[0075]FIG. 14b is a perspective view showing an element 1410b of a recess-type hybrid thin-film piezoelectric light modulator, according to the present invention. Referring to FIG. 14b, the element 1410b includes a plurality of protrusions 1420b1, 1420b2 and 1420b3 which is placed on a micromirror layer 1415b of the element 1410b that reflects and diffracts incident light. Each protrusion 1420b1, 1420b2, 1420b3 has a rectangular column shape (ribbon shape). When the longitudinal axis of the element 1410b is defined as the axis passing over the recess, the protrusions 1420b1, 1420b2 and 1420b3 are arranged along a latitudinal axis of the element 1410b, unlike the element 1410a of FIG. 14a. The protrusions 1420b1, 1420b2 and 1420b3 are spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 1420b1, 1420b2, 1420b3). Each protrusion 1420b1, 1420b2, 1420b3 includes a support layer 1421b1, 1421b2, 1421b3 which is attached at...

third embodiment

[0077]FIG. 14c is a perspective view showing an element 1410c of a recess-type hybrid thin-film piezoelectric light modulator, according to the present invention. Referring to FIG. 14c, the element 1410c includes a plurality of protrusions 1420c1, 1420c2 and 1420c3 which is placed on a micromirror layer 1415c of the element 1410c that reflects and diffracts incident light. Each protrusion 1420c1, 1420c2, 1420c3 has a rectangular column shape (ribbon shape). The protrusions 1420c1, 1420c2 and 1420c3 are arranged along a longitudinal axis of the element 1410c, passing over the recess, to be spaced apart from each other at regular intervals (for example, each interval is the same as the width of the protrusion 1420c1, 1420c2, 1420c3). Each protrusion 1420c1, 1420c2, 1420c3 includes a support layer 1421c1, 1421c2, 1421c3 which is attached at a lower surface thereof to an upper surface of the micromirror layer 1415c of the element 1410c. The protrusion 1420c1, 1420c2, 1420c3 further incl...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The present invention provides a hybrid light modulator which includes a plurality of ribbons each having a plurality of protrusions to diffract incident light even at an early light receiving stage and to control a diffractive angle of the light beam using a microactuator, thereby realizing miniaturization of a device and assuring ease of digital operation.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates generally to light modulators, and more particularly, to a hybrid light modulator which includes a plurality of ribbons each having a plurality of protrusions to diffract incident light from an early light receiving stage and to control a diffractive angle of the light beam using a microactuator, thereby realizing the miniaturization of a device and assuring the ease of digital operation, unlike conventional diffractive optical modulators in which incident light is reflected and diffracted by the operation of a plurality of micromirror actuators. [0003] 2. Description of the Related Art [0004] Generally, an optical signal processing technology has advantages in that a great amount of data is quickly processed in a parallel manner unlike a conventional digital information processing technology in which it is impossible to process a great amount of data in real time. Studies have been con...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B6/12G02B26/00G02B26/08
CPCG02B26/0808G02B26/00
Inventor YUN, SANG KYEONG
Owner SAMSUNG ELECTRO MECHANICS CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap