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Spatial-heterodyne interferometry for transmission (SHIFT) measurements

a technology of spatial heterodyne and transmission, applied in the field of spatial heterodyne interferometry, can solve the problems of long scan, no complex wavefront information, and no information regarding the interior of an object of interest provided by ddh

Inactive Publication Date: 2006-08-31
BINGHAM PHILIP R +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This reflected wave is combined with a reference wave at the digital imaging device so that they interfere and create a set of linear interference fringes.
However, DDH does not provide information regarding the interior of an object of interest and only provides information regarding the surface of the object.
However, a limitation of PCM is that no complex wavefront information is provided, the phase information from PCM being represented by amplitude only.
While this technique is able to measure phase changes, 30 seconds are required for each height measurement and, therefore, a slow scan would be required to measure phase changes across an interior portion of an object and a very long scan would be required to measure phase changes over an entire mask.
Heretofore, the requirements of both providing complex wavefront information regarding an interior portion of an object and providing that information quickly have not been met.

Method used

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  • Spatial-heterodyne interferometry for transmission (SHIFT) measurements

Examples

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examples

[0046] Specific embodiments of the invention will now be further described by the following, nonlimiting examples which will serve to illustrate in some detail various features. The following examples are included to facilitate an understanding of ways in which the invention may be practiced. It should be appreciated that the examples which follow represent embodiments discovered to function well in the practice of the invention, and thus can be considered to constitute preferred modes for the practice of the invention. However, it should be appreciated that many changes can be made in the exemplary embodiments which are disclosed while still obtaining like or similar result without departing from the spirit and scope of the invention. Accordingly, the examples should not be construed as limiting the scope of the invention.

example set 1

[0047] The invention can include a method for measuring (in a single high-speed digital image capture) the complex wavefront of an electromagnetic wave after it passes through an at least partially translucent material, using Spatial-Heterodyne Interferometry (SHI). Measuring the complex wavefront gives the absorption and phase shift incurred by the electromagnetic wave while passing through the object material. Spatial-Heterodyne Interferometry For Transmission (SHIFT) measurements use a small angle between the object beam and the reference to create a set of linear fringes that spatially heterodynes the transmitted wavefront. The inventors have realized the importance of the measurement of transmitted complex-wavefronts for objects such as translucent materials, lithography masks, and biological samples. In contrast to traditional phase shift interferometry, spatial-heterodyne interferometry for transmission (SHIFT) measurements allow high speed reconstruction of the measured wave...

example set 2

[0055] The invention can include a method and apparatus for acquiring both the reflected and transmitted complex wavefronts of an electromagnetic wave incident on a translucent material for complete inspection / metrology of the material using Spatial-Heterodyne Interferometry (SHI). It also includes a method and apparatus for measuring and combining the transmitted and reflected complex wavefronts simultaneously. When an electromagnetic wave (as from a laser) is incident on a translucent object surface, a portion of the wave energy is transmitted into the material and a portion is reflected from the material surface. A system which can acquire the complex wavefronts for both the transmitted and reflected waves can be used to analyze and inspect both.

[0056] Spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements use the small angle interference to create an interference pattern; however, the method and apparatus have been modified to capture both the tr...

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PUM

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Abstract

Systems and methods are described for spatial-heterodyne interferometry for transmission (SHIFT) measurements. An apparatus, includes: a source of coherent light energy; a reference beam subassembly optically coupled to the source of coherent light; an object beam subassembly optically coupled to the source of coherent light; a beamsplitter optically coupled to both the reference beam subassembly and the object beam subassembly; and a pixilated detection device optically coupled to the beamsplitter. The object beam subassembly includes an object that is at least partially translucent, the object transmissively optically coupled between the source of coherent light energy and the beamsplitter.

Description

CROSS-REFERENCE TO RELATED APPLICATION [0001] This application is a continuation of, and claims a benefit of priority under 35 U.S.C. 120 from copending utility patent application U.S. Ser. No. 10 / 649,251, filed Jun. 23, 2003, the entire contents of which are hereby expressly incorporated herein by reference for all purposes.STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY-SPONSORED RESEARCH OR DEVELOPMENT [0002] This invention was made with united States Government support under prime contract No. DE-AC05-00OR22725 to UT-Battelle, L.L.C. awarded by the Department of Energy. The Government has certain rights in this invention.BACKGROUND OF THE INVENTION [0003] 1. Field of the Invention [0004] The invention relates generally to the field of spatial-heterodyne interferometry (SHI). More particularly, the invention relates to methods and machinery for obtaining spatial-heterodyne interferometry for transmission (SHIFT) and spatial-heterodyne interferometry for reflection and t...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01B9/021G01B11/06G03F1/00G03H1/08
CPCG01B11/0675G03F1/26G03F1/84G03H1/0866G03H2001/0456G03H2001/0471G03H2210/12
Inventor BINGHAM, PHILIP R.HANSON, GREGORY R.TOBIN, KEN W.
Owner BINGHAM PHILIP R
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