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Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus

a transducer device and ultrasonic technology, applied in the field of ultrasonic transducer devices, probe heads, ultrasonic probes, electronic machines, etc., can solve the problems of reducing the strength affecting the operation of the ultrasonic transducer device, so as to reduce the effect of reducing the strength and minimizing the decline of element properties

Inactive Publication Date: 2016-11-10
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention offers various ultrasonic transducer devices, probe heads, ultrasonic probes, electronic machines, and ultrasonic diagnostic apparatuses that have improved strength and minimal decline in element properties.

Problems solved by technology

However, in this technique, a plurality of openings are provided to the substrate, and therefore the strength of the substrate has been diminished, and the ultrasonic transducer device has been damaged by pressure from the exterior, among other problems.

Method used

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  • Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus
  • Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus
  • Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus

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Embodiment Construction

[0025]The following describes in greater detail a preferred embodiment of the present invention. The present embodiment described below is not, however, meant to gratuitously limit the content of the present invention described in the claims, nor is the entire configuration described in the present embodiment necessarily essential in terms of the solution of the present invention.

1. Ultrasonic Transducer Element

[0026]FIGS. 1A and 1B illustrate an example of a basic configuration for an ultrasonic transducer element (a thin-film piezoelectric ultrasonic transducer element) 10 included in an ultrasonic transducer device of the present embodiment. The ultrasonic transducer element 10 of the present embodiment includes a vibrating membrane (membrane, support membrane) 42 and a piezoelectric element section. The piezoelectric element section includes a lower electrode (first electrode layer) 21, a piezoelectric body membrane (piezoelectric body layer) 30, and an upper electrode (second e...

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Abstract

An ultrasonic transducer device includes a substrate on which a plurality of openings are arranged; a plurality of ultrasonic transducer elements, each of the ultrasonic transducer elements being provided to each of the openings of the plurality of openings, on a first surface of the substrate; and a member fixed to a second surface of the substrate, which is a surface on the opposite side of the first surface of the substrate. Provided to the member are a plurality of first groove sections, and a second groove section for bundling together the plurality of the first groove sections.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This is a continuation application of U.S. patent application Ser. No. 14 / 051,563 filed on Oct. 11, 2013. This application claims priority to Japanese Patent Application No. 2012-226671 filed on Oct. 12, 2012. The entire disclosures of U.S. patent application Ser. No. 14 / 051,563 and Japanese Patent Application No. 2012-226671 are hereby incorporated herein by reference.BACKGROUND[0002]1. Technical Field[0003]The present invention relates to an ultrasonic transducer device, a probe head, an ultrasonic probe, an electronic machine, an ultrasonic diagnostic apparatus, and the like.[0004]2. Related Art[0005]One known example of an apparatus for insonifying a subject with ultrasonic waves and receiving reflected waves coming from an interfacial surface at which the acoustic impedance is different within the interior of the subject is an ultrasonic diagnostic apparatus for inspecting the interior of a human body. For example, Japanese Laid-open...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L41/053A61B8/00H01L41/113H01L41/083H01L41/09B06B1/06H10N30/20H10N30/88H10N30/30H10N30/50
CPCH01L41/053H01L41/09B06B1/0622H01L41/1132A61B8/4411A61B8/4494A61B8/4427A61B8/4405H01L41/0838A61B8/4483H10N30/20H10N30/88H10N30/302H10N30/508
Inventor NAKAMURA, TOMOAKIONISHI, YASUNORIYOSHIDA, KAZUKIENDO, KOGO
Owner SEIKO EPSON CORP