Sensing devices, sensors, and methods for monitoring environmental conditions
a technology of sensing devices and sensors, applied in the field of electromechanical devices, can solve problems such as not readily adapting to automation
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[0018]The following describes electromechanical devices, electromechanical device-based sensors and systems, and methods adapted to monitor environmental conditions, such as physical, electromagnetic, thermal, and / or chemical parameters within an environment. As used herein, the term “electromechanical device(s)” will be used to mean various types of miniaturized electromechanical systems, including micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS), that are generally on a scale of less than a millimeter, incorporate both electronic and mechanical functionalities, and are produced by micromachining techniques such as bulk etching and / or surface thin-film etching.
[0019]The electromechanical devices are configured as sensing devices that include at least one electrical contact and a sensing element capable of moving to open or close the electrical contact(s) in response to the presence or absence of an environmental parameter of interest. The sensing ele...
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