Probe card device and fence-like probe thereof
a technology of probe card and probe, which is applied in the field of electrically conductive probes, can solve problems such as compact circuits
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first embodiment
[0025]Referring to FIG. 1 to FIG. 8, a first embodiment of the present disclosure provides a probe card device 1000. As shown in FIG. 1, the probe card device 1000 includes a probe head 100 and a circuit board 200 that is abutted against (or fixed to) one side of the probe head 100 (e.g., the top side of the probe head 100 shown in FIG. 1), and another side of the probe head 100 (e.g., the bottom side of the probe head 100 shown in FIG. 1) is configured to abut against and test a device under test (DUT) that can be a semiconductor wafer (not shown in the drawings). In other words, the probe card device 1000 in the present embodiment does not have any space transformer arranged between the probe head 100 and the circuit board 200, and the probe head 100 is directly connected to (or fixed onto) the circuit board 200.
[0026]It should be noted that in order to clearly describe the structure and connection relationship of each component of the probe card device 1000, the drawings of the p...
second embodiment
[0046]Referring to FIG. 9, a second embodiment of the present disclosure is similar to the first embodiment of the present disclosure. For the sake of brevity, descriptions of the same components in the first and second embodiments of the present disclosure will be omitted herein, and the following description only discloses different features between the first and second embodiments.
[0047]In the present embodiment, the probe card device 1000 further includes a space transformer 300 that connects the circuit board 200 and the fence-like probes 4. Each of the fence-like probes 4 is fixed onto the space transformer 300 through the fixing point 424 thereof. In other words, the fence-like probes 4 in the present embodiment are electrically coupled to the circuit board 200 through the space transformer 300.
[0048]Accordingly, by the structural design of each of the fence-like probes 4 (e.g., the fixing point 424 and the abutting point 431 are spaced apart from each other by the fan-out di...
third embodiment
[0049]Referring to FIG. 10, a third embodiment of the present disclosure is similar to the first and second embodiments of the present disclosure. For the sake of brevity, descriptions of the same components in the first to third embodiments of the present disclosure will be omitted herein, and the following description only discloses different features between the third embodiment and the first and second embodiments.
[0050]In the present embodiment, the fan-out distances FD of the fence-like probes 4 include at least two different values. In other words, the probe head 100 is provided with the fence-like probes 4 having the fan-out distances FD of different values, thereby satisfying different design requirements and allowing the fixing points 424 of the fence-like probes 4 to be directly fixed onto a circuit board (not shown in FIG. 10). In other words, the fence-like probes 4 in the present embodiment can be formed to have the fan-out distances FD of different values so as to rep...
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