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Liquid-ejecting head and liquid-ejecting apparatus

a liquid-ejecting head and liquid-ejecting technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostriction/magnetostriction machines, etc., can solve the problem that the piezoelectric element is unlikely to be driven at low voltage, and achieve the effect of reducing lead content and less negative impact on the environmen

Inactive Publication Date: 2014-06-10
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0008]An advantage of some aspects of the invention is to provide a liquid-ejecting head which needs no midpoint potential, which can be driven at low voltage, and which has a less negative impact on the environment. Another advantage of some aspects of the invention is to provide a liquid-ejecting apparatus.
[0010]In this aspect, the piezoelectric layer contains perovskite-structured bismuth sodium potassium titanate and satisfies the inequality 0≦Pr / Pm≦0.25 at 25° C., where Pm and Pr are the saturation polarization and remanent polarization, respectively, of the piezoelectric layer. Therefore, the piezoelectric layer can be driven at low voltage because a piezoelectric material need not be polarized and no midpoint potential is needed to drive the piezoelectric layer. Furthermore, the content of lead can be reduced and therefore negative impacts on the environment can be reduced.
[0011]The piezoelectric layer preferably further contains perovskite-structured barium titanate. This allows the piezoelectric element, which is included in the liquid-ejecting head, to have high piezoelectric properties (strain).
[0014]Another aspect of the invention provides a liquid-ejecting apparatus including the liquid-ejecting head. In this aspect, the liquid-ejecting apparatus needs no midpoint potential, can be driven at low voltage, and has a reduced lead content and a less negative impact on the environment.

Problems solved by technology

Therefore, the piezoelectric element has a problem that the piezoelectric element is unlikely to be driven at low voltage.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

first embodiment

[0087]FIG. 1 is an exploded perspective view of an ink jet recording head that is an example of a liquid-ejecting head according to a first embodiment of the invention. FIG. 2A is a plan view of the ink jet recording head. FIG. 2B is a sectional view taken along the line IIB-IIB of FIG. 2A. The ink jet recording head includes a channeled substrate 10 made from a single-crystalline silicon wafer and an elastic film 50 which is made of silicon dioxide and which is disposed on a surface of the channeled substrate 10.

[0088]The channeled substrate 10 includes a plurality of pressure-generating chambers 12 arranged in the width direction thereof. A communicating portion 13 is disposed in a region of the channeled substrate 10 that is outwardly spaced from the pressure-generating chambers 12 in the longitudinal direction thereof. The communicating portion 13 is communicatively connected to the pressure-generating chambers 12 through ink supply channels 14 and communicating channels 15 each...

example 1

[0132]A silicon dioxide film was formed by the thermal oxidation of a surface portion of a silicon substrate. A titanium dioxide layer with a thickness of 40 nm was deposited on the silicon dioxide film and a (111)-oriented platinum layer with a thickness of 150 nm was deposited on the titanium dioxide layer, whereby a first electrode was formed.

[0133]A piezoelectric layer 70 was formed on the first electrode by a spin coating process. A procedure for forming the piezoelectric layer 70 was as described below. Butanol solutions each containing bismuth, potassium, sodium, or titanium were mixed at a predetermined ratio, whereby a precursor solution was prepared. The precursor solution was dripped onto the silicon substrate having the titanium dioxide layer and the first electrode and the silicon substrate was rotated at 2,500 rpm, whereby a piezoelectric precursor film was formed (a coating step). The piezoelectric precursor film was dried and degreased at 400° C. for three minutes (a...

examples 2 and 3

[0135]Piezoelectric elements 300 were prepared in substantially the same manner as that described in Example 1 except that the mixing ratio of butanol solutions each containing bismuth, potassium, sodium, or titanium was varied and complex oxides represented by Formula (1) in which x, a, and b were as shown in Table 1 were contained in piezoelectric layers 70.

[0136]

TABLE 1x1 − xyabExample 10.810.1900.50.5Example 20.710.2900.50.5Example 30.610.3900.50.5Example 40.900.100.040.50.5Example 50.810.190.040.50.5Example 60.710.290.040.50.5Example 70.610.390.040.50.5Example 80.510.490.040.50.5Example 90.900.100.060.50.5Example 100.810.190.060.50.5Example 110.710.290.060.50.5Example 120.610.390.060.50.5Example 130.900.100.120.50.5Example 140.810.190.120.50.5Example 150.710.290.120.50.5Example 160.610.390.120.50.5Comparative Example 10.900.1000.50.5

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PUM

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Abstract

A liquid-ejecting head includes a pressure-generating chamber communicating with a nozzle opening and includes a piezoelectric element including a piezoelectric layer and electrodes. The piezoelectric layer contains bismuth sodium potassium titanate and satisfies the inequality 0≦Pr / Pm≦0.25 at 25° C., where Pm and Pr are the saturation polarization and remanent polarization, respectively, of the piezoelectric layer.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application claims the benefit of priority to Japanese Patent Application No. 2010-051187 filed Mar. 8, 2010, the contents of which are hereby incorporated by reference in their entirety.BACKGROUND[0002]1. Technical Field[0003]The present invention relates to a liquid-ejecting head which changes the pressure in a pressure-generating chamber communicating with a nozzle opening and which includes a piezoelectric layer and electrodes for applying a voltage to the piezoelectric layer and also relates to a liquid-ejecting apparatus.[0004]2. Related Art[0005]Piezoelectric elements each include two electrodes and a piezoelectric layer which is made of a piezoelectric material, such as a crystallized piezoelectric material, having an electromechanical transducing function and which is sandwiched between the electrodes. The piezoelectric elements are used as, for example, flexural vibration-mode actuators and are mounted in liquid-ejecting ap...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): B41J2/015H01L41/00H02N2/00
Inventor YONEMURA, TAKAYUKI
Owner SEIKO EPSON CORP
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