The application discloses a device and method for bending and deforming micro-nano samples in-situ in an
electron microscope, and belongs to the field of scanning / transmission
electron microscope accessories and micro-nano material
mechanical property measurement research. The device comprises four parts, namely a supporting part, a driving part, a bending loading part and a sample stage part. One end of the nano material is fixed to a suspended part at the front end of the sample stage, and the other end is a free end. The free end of the nano material is pushed by the bending loading part driven by the heating and bending
bimetallic strip, so that the nano material achieves the bending and
deformation effect. The application separates and fixes the
bimetallic strip and the sample, solves the problems of poor
mechanical stability and easy movement of the sample in the deformation process of the in-situ bending nano material, improves the stability of the fixed sample and in-situ imaging, realizes the bending and deformation of the sample, and simultaneously observes the
structural evolution of the material in the deformation process. While realizing the bending and deformation of single / multiple nano wire shafts, the
structural evolution of the material in the deformation process is observed in-situ.