Tuning-type micro electro-mechanical gyroscope
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SOUTHEAST UNIV
- Publication Date
- 2008-06-04
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a gyroscope, in particular to a tuned micro-electromechanical gyroscope. Background technique
[0002] Micro-electromechanical gyroscope is a kind of gyroscope made by micro-electromechanical system (MEMS) technology. It has a series of advantages such as small size, light weight, low cost, low power consumption, and good reliability. It has broad application prospects in both military and civilian fields. . Since the invention of micro-electromechanical gyroscopes in the middle and late 1980s, they have been widely valued by developed countries in the world, and they have invested huge sums of money in research. Most of today's micro-electromechanical gyroscopes adopt the resonant type, and its structure is mainly composed of a movable mass block with an additional vibration drive device and an acceleration detection device. The angular velocity of the mass sensitive base vibrating along one axis (x-axis) along another axis ...