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Semiconductor material grafted with organic conjugated molecule on surface and its preparation method

A technology of conjugated molecules and semiconductors, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electric solid-state devices, etc., to achieve good performance

Inactive Publication Date: 2008-08-13
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the grafting of organic conjugated molecules on silicon surfaces via silane coupling has not been systematically reported.

Method used

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  • Semiconductor material grafted with organic conjugated molecule on surface and its preparation method
  • Semiconductor material grafted with organic conjugated molecule on surface and its preparation method
  • Semiconductor material grafted with organic conjugated molecule on surface and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] After the silicon wafer is cleaned and ultrasonically treated with acetone, ether, ethanol and deionized water, it is oxidized by concentrated sulfuric acid / hydrogen peroxide, corroded by HF, reacted with ammonia water and hydrochloric acid solution, and silicon-hydroxyl groups are formed on the silicon surface. At room temperature and then with the molecular formula (CH 3 CH 2 O) 3 -Si-(CH 2 ) 3 -NH 2 The reaction of the silane coupling agent, the hydrolysis of the triethoxy group reacts with the hydroxyl group on the silicon surface to form a Si-O-Si bond. The amino group retained at the terminal undergoes an amide reaction with monofluorenic acid, thereby grafting fluorene with an organic conjugated structure on the silicon surface.

Embodiment 2

[0022] After the silicon wafer was cleaned and ultrasonically treated with acetone, ether, ethanol and deionized water, it was treated with Ar plasma in a plasma-enhanced chemical deposition system (PECVD) for 5 min and then taken out and exposed to air for 5 min. Plasma-treated peroxyl radicals become hydroxyl groups upon exposure to air. Then at room temperature and molecular formula (CH 3 CH 2 O) 3 -Si-(CH 2 ) 3 -NH 2 The reaction of the silane coupling agent, the hydrolysis of the triethoxy group reacts with the hydroxyl group on the silicon surface to form a Si-O-Si bond. The amino group retained at the terminal undergoes an amide reaction with terfluorenic acid, thereby grafting terfluorene with an organic conjugated structure on the silicon surface.

Embodiment 3

[0024] Electron beam bombardment was used to activate the silicon surface, and the others were as in Example 2.

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Abstract

This invention relates to a method to get modified conductor material s through adding organic conjugate molecule on the semi-conductor surface by silane coupling agent as molecule bridge with one end connected to semi-conductor surface by covalent bond and with other end of organo-functional group with organic covalent molecule reaction to add organic molecule on the semi-conductor surface to make the abio-semiconductor and organic molecule combined.

Description

technical field [0001] The invention belongs to the technical field of semiconductor materials, and in particular relates to a semiconductor material with organic molecules grafted on the surface and a preparation method thereof. This material can be suitable for devices such as thin film transistors, electroluminescence, biosensing, chemical detection and so on. Background technique [0002] Over the past decade or so, the opportunities presented by the combination of surface science and organic chemistry have attracted increasing attention with the development of molecular devices. Silicon has become the most important basic material today. In electronic commodities, almost all integrated circuits of microprocessors rely on single crystal silicon wafers. People have done a lot of research on the properties and application potential of silicon wafers. In the mid-to-late 1990s, research on the surface chemistry of this material was carried out. Because organic molecules ha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/30
Inventor 黄维段瑜冯嘉春戴郁菁温贵安
Owner FUDAN UNIV