Vacuum obtaining system

Abstract

This invention discloses a vacuum obtaining system including a molecular pump, in which, the entrance of the pump is connected with a reaction chamber by an entry valve, the exit of the pump is connected with a vacuum pump via an exhaust valve, a protection device for the molecular pump controlling closing the entry valve or exhaust valve according to tested alarming signals and including an alarming device for testing pressure of the entrance, pressure of the exit and working state of the equipment in the system, when the pressure exceeds a set value or the equipment works out of the way, the protection and control device of the pump controls closing the entry or the exhaust valve by a mutual-locking circuit, a mutual-locking screen circuit is also included for turning the mutual-locking circuit lapse and the control signal controls the two valves independently.

Description

technical field [0001] The invention relates to a vacuum obtaining system, in particular to a vacuum obtaining system with a protection device. Background technique [0002] In the field of microelectronics technology, especially in the field of semiconductor technology, most processes often need to be carried out in a high-vacuum reaction chamber. [0003] At present, most high-vacuum equipment uses magnetic levitation molecular pumps, but since the magnetic levitation molecular pumps work in a high-vacuum environment, if the molecular pump is in normal operation, the outlet pressure or inlet pressure exceeds a certain range. Misalignment or destruction of the magnetic suspension bearing. [0004] Currently commonly used high vacuum acquisition systems such as figure 1 As shown, before the molecular pump 4 is started, the side pumping valve 3 is first opened to vacuum the reaction chamber 1, and when the pressure of the reaction chamber 1 is lower than the pressure requir...

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Problems solved by technology

[0005] The shortcoming of above-mentioned system is: if reaction chamber 1 is carrying out process, pendulum valve 2, molecular pump discharge valve 5 are all opened, and reaction chamber 1 is suddenly exposed to atmosphere for some reason, or pressure increases suddenly, and molecular pump 4 inlet pressure Far beyond the required pressure, the molecular pump 4 may be damaged at this time; if the reaction chamber 1 is undergoing a process, the pendulum valve 2 and the molecular pump discharge valve 5 are all opened, for some reason, such as the vacuum pump 7 alarm stops, the molecular The outlet pipe of the pump 4 is suddenly exposed to the atmosphere or the pressure suddenly increases, and the pressure at the outlet of the molecular pump 4 far exceeds the requirement. At this time, the molecular pump 4 may be damaged.

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