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Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit

A technology of integrated circuits and chemical sensors, which is applied in the field of monitoring liquids in the environment of semiconductor institutions and portable chemical sensor devices, can solve the problems of increasing importance

Inactive Publication Date: 2009-04-29
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although leakage is a major problem in any kind of architecture, its importance is greatly exacerbated in chip manufacturing facilities

Method used

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  • Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit
  • Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit
  • Method and system for producing liquid leakage sensor in purifying room mechanism by integrated circuit

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Embodiment Construction

[0030] According to the present invention, techniques for the manufacture of integrated circuits and other electronic devices are provided. More specifically, the present invention provides a method and apparatus for monitoring liquids in the environment of a semiconductor facility. As an example only, the present invention is provided in an ultra-clean room facility (e.g., level 10), but it will be understood that the method and device can be applied to other environments.

[0031] Figure 1 is a simplified high-level schematic diagram of an exemplary leak sensor, its main processing unit, and its connection to the sensor and output signal. The leak sensor system 10 includes a sensor 4, a main processing unit 2 and output signals 14, 16 and 18, and can be combined with figure 2 Get a better description, figure 2 To illustrate a simplified flow chart of the operation of an exemplary leak sensor. Figure 1 and figure 2 All are only examples, which should not unduly limit the scope...

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Abstract

The invention discloses method and device in use for sensing leak of manufacturing mechanism or from environment, which can cause significant damages. The sensor device includes following parts: at least a pair of electrode element, which senses leaking liquid based on whether two electrode elements is contacted or not; amplifier installation in use for receiving and amplifying signal from external sensing units; output unit is in use for generating the output signal based on amplified signal from the amplifier. In an implementing instance, the output unit can be an audio device capable of transmitting audio signal, and visual indicator can be LED or the LED connected to remote monitoring and controlling station. The sensor device also can include switch in use for changing two different sensing ranges of external sensing device.

Description

Background technique [0001] The present invention relates generally to the manufacture of integrated circuits and other electronic devices. More specifically, the present invention provides a method and apparatus for monitoring liquids in the environment of a semiconductor facility. As an example only, the present invention is provided in a clean room facility (e.g. Class 10), but it will be understood that the method and device can be applied to other environments. [0002] Since a long time, human beings have manufactured products and appliances to alleviate the demand for survival and the progress of life in harsh environments. Over the centuries, many, if not all, manufactured products have been produced by hand. Handwork often leads to scale inefficiency and also requires highly trained craftsmen and workers to manufacture the desired products. Craftsmen or trained workers usually manufacture each product by hand, thus extremely adding time before the complete process can be ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M3/40
Inventor 肖叶斌
Owner SEMICON MFG INT (SHANGHAI) CORP