Rotary retaining device for checked optical element

Abstract

The present invention provides a detected optical element rotating retaining device which is provided with a detected body retaining type rotating holding mechanism, and the detected object retainingtype rotating holding mechanism can make it easy to do position adjusting of the axle when the thickness of the detected optical element changes and in the situation that it will not produce bad influence to the measuring of the core shift value. The rotating remaining part (5) provided with the disc shaped rotary body (51) is arranged on the gradient adjusting table (8) by the Z axle moveable table (7A), the orientation remaining part (6) provided with a V-shaped abutting body (61) is arranged on the gradient adjusting table (8) by the (XY) axle moveable table (9) and the Z axle moveable table (7B). The relative height adjusting between the detected les which is kept by the attraction remaining table (4) and the disc shaped rotary body (51) and the V-shaped abutting body is executed by using the axle moveable table (7a) at the side of the rotating remaining part (5) and the axle moveable table (7B) at the side of the orientation remaining part (6).

Description

technical field [0001] The present invention relates to an optical element rotating and holding device for holding the optical element to be inspected so as to be rotatable around a predetermined axis with respect to an optical system of an eccentricity measuring device for measuring the amount of eccentricity of an optical element such as a lens . Background technique [0002] Conventionally, there is known an eccentricity measurement device that measures the eccentricity of an optical element to be inspected by a method called the autocollimation method (see Patent Document 1 below). [0003] Such an eccentricity measurement device requires a rotation holding mechanism for holding the optical element to be inspected so as to be rotatable about a predetermined axis with respect to the measurement optical system. Patent Document 1 below describes a rotation holding mechanism including a suction holding table capable of rotating an optical element to be inspected while being...

AI Technical Summary

Problems solved by technology

[0008] However, there are machining errors in mechanisms such as the Z-axis moving stage used to move the suction and holding stage in the axial direction. There is a slight deviation between the optical axes of the system, and the measurement accuracy of the eccentricity may decrease due to the existence of the deviation.

In addition, due to this deviation, the reflected light from the surface to be detected may not return to the imaging surface.

[0009] Therefore, in the conventional rotating and holding mechanism of the sample clamping type, every time the suction and holding table moves in the optical axis direction, it is necessary to readjust the axial alignment between the suction and holding table and the measurement optical system. This adjustment requires a lot of labor and time

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