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Process control monitors for interferometric modulators

An interferometric modulator, manufacturing process technology, applied in piezoelectric devices/electrostrictive devices, instruments, electro-solid devices, etc., and can solve problems such as errors

Inactive Publication Date: 2007-08-29
IDC LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Errors can occur during MEMS device fabrication

Method used

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  • Process control monitors for interferometric modulators
  • Process control monitors for interferometric modulators
  • Process control monitors for interferometric modulators

Examples

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Embodiment Construction

[0072]The following detailed description is directed to certain specific embodiments of the invention. However, the invention can be implemented in many different ways. Throughout this description reference is made to the drawings in which all like parts are designated by like numerals. As will be appreciated from the following description, the embodiments may be implemented in any device configured to display images, whether in motion (eg, video) or stationary (eg, still images), and whether textual or pictorial. More specifically, it is contemplated that the described embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile phones, wireless devices, personal data assistants (PDAs) , hand-held or portable computers, GPS receivers / navigators, cameras, MP3 players, video cameras, game consoles, watches, clocks, calculators, television monitors, flat panel displays, computer monitors, automotive displays (e.g., mil...

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Abstract

The invention discloses process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.

Description

technical field [0001] The field of the invention relates to microelectromechanical systems (MEMS). Background technique [0002] Microelectromechanical systems (MEMS) contain micromechanical components, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and / or other micromachining processes that etch away portions of substrates and / or deposited material layers or add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and / or reflects light using the principles of optical interference. In some embodiments, an interferometric modulator may include a pair of conductive plates, one or both of which may be transparent and / or reflective in whole or in part, and capable of relative motion upon application of an appropriate electrical signal...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00B81B3/00H01L23/544B81C99/00
Inventor 威廉·J·卡明斯布莱恩·J·加利
Owner IDC LLC
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