Substrate supporting/transferring tray
A substrate and tray technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of uneven temperature and difficult uniform heating of the substrate 1, and achieve the effect of uniform heating
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[0020] Next, preferred embodiments of the present invention will be described with reference to the drawings.
[0021] FIG. 1 is a diagram illustrating a first embodiment of the present invention.
[0022] A substrate support member 2 is provided inside a processing chamber 11 for heat-processing a substrate 1 . The substrate supporting member 2 has a heating member 4 for heating the substrate, which is composed of a thermoelectron generating member for electron impact heating, an infrared lamp for infrared lamp heating, and the like inside. Accordingly, the substrate 1 is heat-processed in the processing chamber 11 .
[0023] The heat treatment of the substrate 1 in the processing chamber 11 may be performed with the inside of the processing chamber 11 in a predetermined vacuum state, or may be performed with the inside of the processing chamber 11 in an atmospheric pressure state.
[0024] The substrate supporting and transporting tray 8 of the present invention is placed ...
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