Laser processing device

Abstract

The invention aims at assuring the stability of a laser optical axis. A laser processing device of the invention comprises: a light source, which outputs the laser; a light path adjusting part, which adjusts the light path of the laser; a first light splitter, which splits the light of the laser; a movable station, which is provided with a prescribed movable area and loads the processed objects;a position detector of the movable station, which detects the position of the movable station; a position detector of a first optical axis, which detects the position of the optical axis of the laserthat is obtained by light splitting in the above mentioned; a loading station, which loads the movable station, the position detector of the movable station and the position detector of a first optical axis; an optical axis controlling part, which receives the output data from the position detector of the first optical axis, controls the adjusting part of the light path, and adjusts the optical axis of the laser obtained by light splitting.

Description

Technical field [0001] The invention relates to a laser processing device, in particular to a laser processing device with precision above nanometer level. Background technique [0002] Generally, a laser processing device is equipped with a laser light source that irradiates the workpiece, and a precision table equipped with a movable table on which the workpiece is placed, and has vibration resistance, and has the following steps: Fix the reference of the laser output from the laser light source Point, move the movable table on the XY plane on the precision table to process the workpiece. In this processing process, considering the error of the position detector that detects the position of the movable table on the precision table, and the error of the laser optical axis caused by the light guide path from the laser light source to the workpiece, the movable table The accuracy of the position detector can achieve accuracy below 10nm, and the stability accuracy of the laser opt...

AI Technical Summary

Problems solved by technology

[0007] However, when the processing accuracy is below the nanometer unit, the error caused by the position detector of the movable table can tolerate the error of the laser processing device, but the oscillation of the laser optical axis is not allowed, and the stability of the laser irradiation point Errors caused by the

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