Heating cavity device
A technology for heating a cavity and a cavity, which is applied in the fields of photosensitive material processing, optics, pollution prevention methods, etc., can solve the problems of black stripe matrix omission, condensation, and the decline in the reasonable rate of production of circuit arrays of liquid crystal displays.
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[0021] The invention provides a heating cavity device. In a preferred embodiment, the heating chamber device is used for the heating process of the liquid crystal display circuit array. However, in different embodiments, the heating chamber device can also be used in the heating process of circuit arrays of other electronic products.
[0022] In the embodiment shown in FIG. 2 , the heating chamber device 900 includes a heating chamber 100 , a closing cover 300 and a cleaning device 500 . The heating chamber 100 has a chamber opening 110 . The closure lid 300 has an inner face 310 . The closing cover 300 can be located at the cavity opening 110 for covering the cavity opening 110 . In the process of liquid crystal display circuit array, the photoresist coated on the substrate must first be volatilized by heating. When the heating chamber device 900 is performing a heating process, part of the solvent will be filled in the heating chamber 100 due to heating volatilization. ...
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