Contact and non-contact type dual-purpose surface roughness measuring systems

A surface roughness and contact measurement technology, applied in the direction of electrical/magnetic roughness/irregularity measurement, measuring device, electromagnetic measuring device, etc., to achieve the effect of expanding the range, accurate and reasonable measurement data, and convenient correction

Inactive Publication Date: 2008-03-12
北京恒安通达科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] Another object of the present invention is to provide a contact and non-contact dual-purpose surface roughness measurement system that can be used to measure small t...

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  • Contact and non-contact type dual-purpose surface roughness measuring systems

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Comparison scheme
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Embodiment 1

[0026] Embodiment 1 As shown in Figure 1, the contact and non-contact dual-purpose surface roughness measurement system mainly consists of a one-dimensional workbench, a column, an optical needle type non-contact measuring head 2, a diamond stylus type measuring head 3, a drive circuit, and a measurement And data acquisition circuit, computer composition. A one-dimensional workbench driven by a stepping motor is fixedly arranged on a fixed base, a fixing device for an object to be measured is arranged on the one-dimensional workbench, and a computer is connected to control the stepping motor through a drive circuit. A column 1 is fixedly arranged on the base next to the one-dimensional workbench, and the column 1 is respectively equipped with a light needle type non-contact measuring head 2 and a diamond stylus type measuring head 3 . Both the optical needle type non-contact measuring head 2 and the diamond stylus type measuring head 3 are set slidingly on the column, and the ...

Embodiment 2

[0027] Embodiment 2 The workbench of the contact and non-contact dual-purpose surface roughness measurement system is fixedly arranged on a base, and another fixed column is installed on the base, and a measuring microscope and a phase grating interferometric PGI contact sensor are movable on the column 4. The worktable is a two-dimensional moving X / Y workbench, and the X / Y workbench is driven by an AC servo motor, and the computer is connected to the AC servo motor that drives the X / Y workbench through the drive circuit 2; A rotating and clamping device for fixing warheads or tools is arranged on the workbench. The rotating and clamping device is connected to and driven by the AC servo motor of the device. The AC servo motor is connected to the computer through the drive circuit 1 . The inductance signal lines of the measuring microscope and the phase grating interferometric PGI contact sensor 4 are connected to the same measurement and data acquisition circuit, and are connec...

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Abstract

The invention relates to a contact and non-contact type dual-purpose surface roughness measuring system which comprises a measuring sensor a computer and is characterized in that the computer is connected and provided with two groups of measuring sensors through measurement and data acquisition circuit, and the two groups of measuring sensors are respectively a non-contact type measuring head and a contact type measuring head. The contact and non-contact type dual-purpose surface roughness measuring system can realize the contact and non-contact type engineering surface roughness measuring method through a measuring instrument, centralize the advantages of contact type and non-contact type, enlarge the range of measuring objects, reduce the cost, provide the precise and reasonable measuring data, implement the real-time contrast and deviation correction for the two measuring results, and be applied to the two-dimensional or three-dimensional mark measurement of engineering roughness of various complex workpiece surfaces to be measured.

Description

technical field [0001] The invention belongs to the field of engineering surface measurement technology and its equipment, and in particular relates to a contact and non-contact measuring method which is used for the measurement of tiny traces of workpieces such as various engineering surfaces and warheads or tools, and has two measurement methods: contact and non-contact. Dual purpose surface roughness measurement system. Background technique [0002] The measurement of traces generally adopts the method of digital photography to obtain the enlarged two-dimensional plane image of the traces of the object to be tested. Since the tiny traces are three-dimensional, they are usually left by mechanical scratches between the relevant parts and the surface of the object to be measured. It is concave and three-dimensional, and its shape and subtle features are distributed in three dimensions, so two-dimensional plane images cannot give a complete description of the traces. For exa...

Claims

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Application Information

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IPC IPC(8): G01B21/30G01B21/20G01B11/30G01B11/24G01B7/34G01B7/28
Inventor 孙正贵李斌
Owner 北京恒安通达科技有限公司
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