Boron-phosphorus-silicon glass film reflow method

Abstract

The reflow process for B-P-Si glass (BPSG) includes the following steps: loading chip with deposited BPSG film into furnace, dry reflow to soften the BPSG film, and wet reflow to fill gaps in BPSG film. The reflow process combines dry reflow and wet reflow can obtain high quality BPSG film, and has shortened reflow period and relatively low reflow temperature.

Description

technical field [0001] The invention relates to a method for forming a borophosphosilicate glass film (BPSG), in particular to a method for reflowing the borophosphosilicate glass film. Background technique [0002] As an important interlayer dielectric, borophosphosilicate glass (BPSG) film is widely used in semiconductor integrated circuits. Usually, the wafer deposited with the borophosphosilicate glass film is put into a furnace tube for reflow, and the reflow methods include dry reflow (Dry Reflow) and wet reflow (Wet Reflow). [0003] At present, dry reflow is usually used in the industry to complete the reflow process of borophosphosilicate glass films. However, only dry reflow can easily lead to the formation of voids 1 in the borophosphosilicate glass film as shown in Figure 1. The existence of these voids will be lost in subsequent processes It is easy to cause a short circuit. Another known technique is to only use wet reflow. The defect of this method will appe...

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Problems solved by technology

[0003] At present, dry reflow is usually used in the industry to complete the reflow process of borophosphosilicate glass films. However, only dry reflow can easily lead to the formation of voids 1 in the borophosphosilicate glass film as shown in Figure 1. The existence of these voids will be lost in subsequent processes It is easy to cause a short circuit

There is also a known technology that only uses wet reflow. The defect of this method will appear on the borophosphosilicate glass film as an abnormal film 2 shown in Figure 1. This film will affect the subsequent manufacturing process.

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