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Very low cost surface emitting laser diode arrays

A laser array, array technology, applied in the direction of lasers, semiconductor lasers, laser parts, etc., can solve the problems of mirror manufacturing yield, angular accuracy and optical smoothness not enough for commercial applications

Inactive Publication Date: 2008-04-16
QUINTESSENCE PHOTONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Unfortunately, the manufacturing yield, angular accuracy, and optical smoothness of mirrors fabricated by these techniques are insufficient for commercial applications

Method used

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  • Very low cost surface emitting laser diode arrays
  • Very low cost surface emitting laser diode arrays
  • Very low cost surface emitting laser diode arrays

Examples

Experimental program
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Embodiment Construction

[0016] An array of semiconductor lasers on a single semiconductor die is disclosed. The die includes a plurality of laser bars optically coupled to a reflective surface. The laser bar generates a plurality of laser beams propagating in a direction substantially parallel to the upper surface of the die. A reflective surface redirects the laser beam to emit in a direction substantially perpendicular to the upper surface. Alternatively, the reflective surface may redirect the laser beam to be emitted from the lower surface of the die. The reflective surface may be formed by etching a vicinally oriented III-V semiconductor die such that the reflective surface extends along the (111)A crystal plane of the die.

[0017] Figures 1 and 2 relate in particular to an embodiment in which the beam is emitted from the upper surface, but the beam can be emitted from the lower surface, if desired, by reversing the inclination of the reflective surface. When the substrate is opaque to the g...

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PUM

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Abstract

An array of semiconductor lasers on a single semiconductive die. The die includes a plurality of laser stripes optically coupled to a reflective surface The laser stripes generate a plurality of laser beams traveling in a direction essentially parallel to a top surface of the die. The reflective surface redirects the laser beams to emit in a direction essentially perpendicular to the top surface. Alternatively, the reflective surface may redirect the laser beams to emit from a bottom surface of the die. The reflective surface can be formed by etching a vicinally oriente_d III-V semiconductive die so that the reflecting surface extends along a (111) A crystalline plane of the die.

Description

[0001] This application claims priority to US Application No. 11 / 042,759, filed January 24,2005. technical field [0002] The disclosed subject matter generally relates to the field of semiconductor lasers. Background technique [0003] Semiconductor laser diode arrays are efficient and reliable high power coherent light sources for a variety of applications including pumping of solid state lasers, dermatology, and materials treatment. Arrays of individually addressable lasers are also used for data communications. [0004] High power laser arrays are usually fabricated by combining multiple laser "rods". Each laser bar consists of a single semiconductor chip incorporating multiple (typically 20) edge-emitting laser bars. Each laser bar is mounted to its own heat sink or heat cooler, and many such components are combined into vertical or horizontal stacks to form the overall high power array. [0005] Arrays using edge-emitting technology have disadvantages that strongly ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/00H01S5/024H01S5/18H01S5/22H01S5/32H01S5/42
CPCH01S5/42H01S5/02292H01S5/12H01S5/024H01S5/0207H01S5/18H01S5/2201H01S5/005H01S5/026H01S5/3202H01S5/1085H01S5/1203H01S5/02255
Inventor M·奥索夫斯基J·E·安格
Owner QUINTESSENCE PHOTONICS