Semiconductor light emitting device
A technology for light-emitting elements and semiconductors, which is applied to semiconductor devices, electrical components, circuits, etc., and can solve problems such as the reduction of light extraction efficiency of light-emitting elements
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[0115] An LED epitaxial wafer is prepared for preparing a red LED having a structure shown in FIG. 1 and a light emission wavelength near 630nm, and making an LED element. Epitaxial growth method, layer thickness of each epitaxial layer, structure and material of each epitaxial layer, structure of reflective metal film layer, structure and size of ohmic contact junction, attachment to support substrate, replacement method, electrode formation method, etching The detailed procedure of the preparation of the method etc. is as follows.
[0116] As shown in FIG. 8, on an n-type GaAs substrate (substrate for growth) 41, n-type (doped with Se) (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P etch stop layer (layer thickness 200nm, carrier concentration 1×10 18 / cm 3 ) (etching stop layer) 42, n-type (doped Se) GaAs contact layer (layer thickness 50nm, carrier concentration 1×10 18 / cm 3 ) (first electrode side contact layer) 3, n-type (doped Se) (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P window layer (l...
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