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Single-crystal bar V type groove deep measurement method

A measuring method and technology of V-groove, applied in the direction of mechanical depth measurement, etc., can solve the problems of restricting the processing and production of silicon single wafer and unable to meet the groove depth accuracy.

Inactive Publication Date: 2008-05-14
浙江普通电子股份公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem existing in the prior art is: because the shape of the groove is "V" and the opening is small, and the top arc surface of the V-shaped groove is truncated, so that the current measuring tools cannot go deep into the groove to measure accurately. The groove depth data cannot meet the high accuracy requirements of V-groove groove depth for polishing wafer processing, and economic disputes often occur between manufacturers and users, which restricts the processing and production of silicon single wafers.

Method used

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  • Single-crystal bar V type groove deep measurement method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Example 1: Measurement of the V-groove depth of a φ150mm single crystal rod

[0018] Known needle roller diameter d=3.0mm; use a vernier caliper to measure the diameter of the φ6" single crystal rod on the left side of the V-shaped groove D=150.3mm; fix the single crystal rod on the single crystal frame, and place the needle roller on the V-shaped groove On the groove, use a vernier caliper to measure the total height H=152.8mm from the bottom of the needle roller to the top of the single crystal rod; put the known data and measured data into the formula, then the groove depth h=1.207d+D-H=1.207×3+150.3 -152.8=1.119mm, therefore, it meets the user's requirement that the depth of the V-groove is between 1-1.25mm.

Embodiment 2

[0019] Example 2: Measurement of V-shaped groove depth of φ200mm single crystal rod

[0020] Known needle roller diameter d=3.0mm; use a vernier caliper to measure the diameter of the φ8" single crystal rod on the right side of the V-shaped groove D=200.7mm; fix the single crystal rod on the single crystal frame, and place the needle roller on the V-shaped groove On the groove, use a vernier caliper to measure the total height H=203.1mm from the bottom of the needle roller to the top of the single crystal ingot; substituting the known data and the measured data into the formula, the groove depth=1.207d+D-H=1.207×3+200.7- 203.1=1.221mm. Therefore, it meets the user's requirement that the depth of the V-groove is between 1-1.25mm.

Embodiment 3

[0021] Example 3: Measurement of V-groove depth of φ300mm single crystal rod

[0022] It is known that the diameter of the needle roller is d=3.0mm; use a vernier caliper to measure the diameter of the φ12″ single crystal rod on the right side of the V-shaped groove D=301.1mm; fix the single crystal rod on the single crystal frame, and place the needle roller on the V-shaped groove On the groove, use a vernier caliper to measure the total height H=303.7mm from the bottom of the needle roller to the top of the single crystal rod; put the known data and measured data into the formula, then the groove depth=1.207d+D-H=1.207×3+301.1- 303.7=1.021mm. Therefore, it meets the user's requirement that the depth of the V-groove is between 1-1.25mm.

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Abstract

A measuring method for the depth of single crystal bar V-shaped slot is finished by the following steps. Under the condition that the included angle of the two sides of the known V-shaped slot is equal to 90 degrees, the V-shaped slot is provided with a roller pin, the known diameter d of which is larger than the mouth width of the V-shaped slot; a vernier caliper is used for measuring out the diameter D of the single crystal bar, and the total height H of the roller pin and the single crystal bar; then the measured data and the known data are substituted into the formula that h is equal to 1.207d plus D-H, and the numerical value is the slot depth. The invention uses a roller pin with a known diameter, measures out a plurality of simple geometric data by the vernier caliper which is a measuring tool in common use and then substitutes the data that are known and measured into the formula, thereby being capable of calculating out the depth of the V-shaped slot. The invention has a simple method, relates to few tools and is in particular to be applied in the manufacture process. The invention can quickly and accurately acquire the depth value of the V-shaped slot, thereby effectively ensuring the normal proceeding of manufacture.

Description

【Technical field】 [0001] The invention relates to a measuring method, in particular to a measuring method for the depth of a V-shaped groove of a single crystal rod. 【Background technique】 [0002] During the processing of silicon single wafers with a diameter of 150 mm to 300 mm, there is a process of opening an axial V-shaped groove with a "V"-shaped cross-section on the outer peripheral surface of a cylindrical single crystal rod, and the groove depth is required to be controlled at 1.0- 1.25mm, as the main reference plane. In order to ensure the quality of the subsequent processing of the polished sheet, in actual operation, the groove depth of the V-shaped groove must be re-measured before processing the polished sheet to obtain accurate V-shaped groove depth data. The problem existing in the prior art is: because the shape of the groove is "V" and the opening is small, and the top arc surface of the V-shaped groove is truncated, so that the current measuring tools can...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B5/18
Inventor 楼春兰吴胜登张光明方强
Owner 浙江普通电子股份公司