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Non-linear hysteresis intelligent compensation process and intelligent compensation system for silicon-scattering pressure sensor

A technology of diffusion silicon pressure and compensation method, applied in general control system, measuring fluid pressure, control/regulating system, etc., can solve the problem that the measurement accuracy of diffusion silicon pressure sensor has not been completely solved, and achieves easy development and application, precision High, simple structure

Inactive Publication Date: 2008-06-18
GUILIN UNIV OF ELECTRONIC TECH
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Problems solved by technology

[0004] Because the influence of the hysteresis and creep nonlinearity of diffused silicon pressure sensors on the measurement accuracy has not been completely resolved, researchers pin their hopes on the discovery of new materials and the improvement of processes
But its modeling is only to get the positive model of the research object

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  • Non-linear hysteresis intelligent compensation process and intelligent compensation system for silicon-scattering pressure sensor

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Embodiment Construction

[0040] The non-linear hysteresis intelligent compensation method of the diffused silicon pressure sensor of the present invention is further described in conjunction with the embodiments.

[0041] Figure 1 shows the hysteresis inverse curve of a certain diffused silicon pressure sensor. When the input x increases from 0 to 1, the sensor output H(x) track is A→B→C. When the input x increases from 1 When it gradually decreases to 0, the running track of the output H(x) of the sensor is C→D→A, and the output signal is different in the forward journey and the reverse journey.

[0042] Define the corresponding hysteretic inverse operator:

[0043] f(y)=(y-y p ) 1 / 3 +f(y p ) (1)

[0044] Where: y represents the current hysteretic inverse operator input H(x);

[0045] f(y) represents the current hysteretic inverse operator output;

[0046] the y p Indicates the previous input extremum adjacent to the current input;

[0047] f(y p ) indicates that the input is an extreme v...

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Abstract

The invention provides a nonlinear hysteretic intelligent compensation method and an intelligent system thereof for a diffusion silicon pressure sensor. A hysteretic inverse operator which is of simple structure and easy realization is introduced by the method. The output of the hysteretic inverse operator is only related with the extreme value of an adjacent preceding input and output. The curve is of synchronous change with the extreme value point of the hysteretic inverse curve of the sensor and is of different amplitudes. The point to point single value of the lifting section of the hysteretic inverse operator is mapped to the expected amplitude by fuzzy modeling. A fuzzy model is established to form a hysteretic mixed model with the hysteretic inverse operator. The non-smooth and nonlinear hysteretic characteristics of the sensor are adapted and compensated. The method effectively improved the measuring accuracy of the diffusion silicon pressure sensor. The intelligent compensation system established according to the method comprises the diffusion silicon pressure sensor and a computer. The computer comprises a filter module and a hysteretic inverse mixed compensation module. The compensation module comprises the hysteretic inverse operator and a T-S fuzzy modeling. An electrical signal which is of the hysteretic characteristics conducted by nonlinear compensation is outputted by the computer. The sensor technology is easy to be developed and applied.

Description

(1) Technical field [0001] The invention relates to a signal processing method of a sensor, in particular to a non-linear hysteresis intelligent compensation method for a diffused silicon pressure sensor and an intelligent compensation system for a diffused silicon pressure sensor constructed by the method. (2) Background technology [0002] Diffused silicon pressure sensor is an important sensor for measuring pressure at present, and is widely used in industry, agriculture, meteorological department, aerospace and other fields. With the development of semiconductor technology, the requirements for various technical indicators of diffused silicon pressure sensors are constantly increasing, but the inherent unconventional, multi-value corresponding rough hysteresis nonlinear characteristics of diffused silicon pressure sensors limit their measurement accuracy. improvement. [0003] The signal processing methods of various intelligent sensors (including diffused silicon press...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/02G01L9/00
Inventor 党选举杨俊
Owner GUILIN UNIV OF ELECTRONIC TECH
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