Device for fast detecting exiguity object three-dimensional contour dimension based on liquid zoom lens

A technology of zoom lens and external dimensions, which is applied in the field of devices for rapid detection of three-dimensional external dimensions of tiny objects, can solve the problems of reducing test speed and instrument service life, and achieve the goal of improving measurement speed and service life, and increasing measurement range Effect

Inactive Publication Date: 2008-07-30
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

In the measurement process using this method, after each image is scanned, the position of the objective l

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  • Device for fast detecting exiguity object three-dimensional contour dimension based on liquid zoom lens

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Embodiment

[0023] The device of the present invention is shown in Figure 1, and the device comprises a two-dimensional translation stage 1, a measured object 2, a liquid zoom lens 3, a finite conjugate objective lens 4, a focusing lens 5, a CCD camera 6, an image acquisition module 7, and a computer 8 , the liquid zoom lens controller 9; the measured object 2 is placed on the two-dimensional translation platform, and the measured object 2 is imaged on the photosensitive image surface of the CCD camera 6 after the liquid zoom lens 3, the finite conjugate objective lens 4, and the focusing mirror 5; The CCD camera 6 is connected with the computer 8 through the image acquisition module 7; the computer 8 is connected with the liquid zoom lens 3 through the liquid zoom lens controller 9.

[0024] Adopt liquid zoom lens 3, computer 8, the device that liquid zoom lens controller 9 forms; Computer 8 drives liquid zoom lens 3 through liquid zoom lens controller 9, changes the focal length of liqui...

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Abstract

The invention belongs to the technical field of optical precision measurement, which relates to a fast testing device of three-dimensional dimensions of the shape of tiny objects based on a liquid zoom lens. The invention comprises a two-dimensional translation table, a tested object, a liquid zoom lens, a limited conjugate objective lens, a focusing lens, a CCD vidicon, an image collection module, a computer and a liquid zoom lens controller. The tested object is put on the two-dimensional translation table, and images are formed on a sensitizing image surface of the CCD vidicon via the liquid zoom lens, the limited conjugate objective lens and the focusing lens. The CCD vidicon is connected with the computer by the image collection module, and the computer is connected with the liquid zoom lens by the liquid zoom lens controller. The invention applies the liquid zoom lens to the fast testing of the three-dimensional dimensions of the shape of the tiny objects, and the measuring speed and the service life of the testing device are improved because no mechanical moving parts are arranged in an optical system of the testing device. The invention can be used for fast testing three-dimensional dimensions of shapes in fields like mechanical processing, MEMS, microelectronics, biological medicine, etc.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and is a device for realizing rapid detection of three-dimensional external dimensions of tiny objects, which can be used for rapid detection of three-dimensional external dimensions in the fields of mechanical processing, MEMS, microelectronics, biomedicine and the like. technical background [0002] Machining, MEMS, microelectronics, biomedicine and other fields have higher and higher requirements for the detection of three-dimensional dimensions of tiny objects. The increasingly wide application requirements of three-dimensional measurement technology in the above fields have greatly promoted the development of three-dimensional measurement technology. At present, the commonly used measurement methods mainly include: contact mechanical measurement, non-contact photoelectric measurement and other measurement methods. Such as three-coordinate measuring machine, binocular me...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B11/24G05D3/10
Inventor 林家明何川沙定国孙若端赵维谦周桃庚张旭升陈凌峰张海涛李鹏
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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