Viewing device for polysilicon furnace

An observation device, polysilicon technology, applied in the fields of silicon compounds, inorganic chemistry, non-metallic elements, etc., can solve the problems of inability to ensure the safety of operators, inability to understand the furnace body at all times, inconvenience in daily work, etc., to achieve accurate and comprehensive observation and simple structure. , the effect of low production cost

Active Publication Date: 2010-08-04
JINGYUNTONG TECH CO LTD
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Therefore, it is very dangerous for operators to observe and operate in this environment, and electric shocks occur from time to time, which cannot guarantee the safety of operators. To know and grasp the production situation of silicon ingots inside the furn

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  • Viewing device for polysilicon furnace
  • Viewing device for polysilicon furnace
  • Viewing device for polysilicon furnace

Examples

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Example Embodiment

[0008] Specific implementation plan

[0009] Such as figure 1 As shown, a polysilicon furnace observation device is mainly composed of a furnace body observation port base 2, an infrared thermometer probe 13, a camera 14, and an electronic control motor 15. The furnace body 4 is located on the support 6, the upper end of the furnace body is provided with an electrical box 3, the lower end of the furnace body is provided with a furnace cover 7, the furnace body and the furnace cover are opened and closed by the furnace cover lifting device 5, and the side of the furnace body is provided with a vacuum pipe 8 It is connected with a vacuum pump to keep the furnace in a vacuum. The observation port base of the furnace is provided with a crystal growth rate measuring hole 10 and a gas inlet and outlet valve 22. It is a traditional structure distribution, so it will not be repeated. In the present invention, an observation unit 1 is provided on the base of the furnace body observation p...

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Abstract

The invention pertains to an observing device of a polysilicon furnace. The observing device is arranged on the base of the viewing port of a furnace body and consists of a base, a bearing, an electric-control motor, a conveyor belt, a rotary shaft, a rotating seat, an infrared thermo detector probe, a camera and a viewport observing mirror, wherein, the base, one end of which is fixedly providedwith the electric-control motor, is fixedly connected on the base of the viewing port of the furnace body; the electric-control motor drives a motor wheel and a shaft wheel which is coaxial with the rotary shaft by the conveyor belt; the lower end of the shaft wheel is connected with the base by the bearing while the upper end of the shaft wheel is provided with the rotating saddle, on which the infrared thermo detector probe, the camera and the viewport observing mirror are arranged. Since the observing device is arranged on the base of the viewing port of the furnace body and the situation in the furnace body can observed on an operating worktable all the time, the safety of operators can be guaranteed and the observation is accurate and comprehensive with time and labor saved; in addition, the observing device has the advantages of simple structure, low manufacturing cost, convenient use and good effects.

Description

technical field [0001] The invention belongs to a polysilicon furnace observation device. Background technique [0002] At present, during the production of polysilicon furnaces, in order to maintain the high temperature and high pressure in the furnace body, the furnace body is required to be well sealed, so only one observation window is set at the upper end of the furnace body. When producing silicon ingots, the traditional observation methods are all carried out manually, that is, the operator uses visual inspection outside the observation window or carries an infrared temperature measurement device. Since the upper end of the furnace body is equipped with a heating element in addition to the observation window located in the center of the top Each high-voltage power supply connector and the wire connector and electrical box of each controller. Therefore, it is very dangerous for operators to observe and operate in this environment, and electric shocks occur from time t...

Claims

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Application Information

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IPC IPC(8): C01B33/021
Inventor 张志新王军李占贤曹政
Owner JINGYUNTONG TECH CO LTD
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