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Order reduction modeling method of micro electro-mechanical system containing considerable input ports

A micro-electromechanical system and input port technology, which is applied in the fields of electrical digital data processing, special data processing applications, instruments, etc., can solve problems such as low solution efficiency

Inactive Publication Date: 2008-12-03
NORTHWESTERN POLYTECHNICAL UNIV
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Problems solved by technology

[0010] In order to overcome the problem of low solution efficiency in the prior art, the present invention provides a reduced-order modeling method for micro-electromechanical systems, which can realize reduced-order modeling of MEMS structures with a large number of input ports

Method used

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  • Order reduction modeling method of micro electro-mechanical system containing considerable input ports
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  • Order reduction modeling method of micro electro-mechanical system containing considerable input ports

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Embodiment Construction

[0039] The present invention will be further described below in conjunction with a macro model extraction process of a variable-section folded beam. The variable cross-section folded beam is a typical structure in MEMS design, and it is widely used in the design of MEMS devices such as micro accelerometers, micro gyroscopes, and micro gratings. Refer to attached figure 2 , its structure is made of five thick beams 1, twenty-two thin beams 2 and twelve longitudinal beams 3. The macro model extraction process of variable cross-section folded beam includes the following steps:

[0040] Step 1: Use 3D modeling tools to establish the geometric model of the variable cross-section folded beam. Use the finite element software ANSYS to select the beam188 material and Solid92 element for modal analysis. The finite element model contains two constraint surfaces and 7718 nodes, including Two input and output nodes, since each node of beam188 contains 6 degrees of freedom, that is, tran...

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Abstract

The invention discloses a deflation modeling method of a micro-electronic-mechanical-system (MEMS) which contains a plurality of input ports. A three-dimension solid model of the structure is established according to the parameters of structure design, modal analysis is carried out by using a finite element method, the quality and the rigidity matrix of the structure is extracted from analysis results, and a second order dynamics action equation of the structure is converted into a first order state equation after being established; an input matrix B is uniformly splitted into k blocks by rows to obtain the state equation of the structure after splitting; deflation is carried out to the application subblock of the (i)th sub-system to obtain the macro model state equation of the (i)th sub-system; the integral macro model of the original system can be obtained after the macro models of all the sub-systems are superposed according to output. The method speeds up the MEMS system level modeling and simulation based on the macro models, thus improving the design efficiency of the MEMS.

Description

technical field [0001] The invention relates to a modeling method of a micro-electro-mechanical system (MEMS), which belongs to the field of micro-electro-mechanical system design and model reduction. Background technique [0002] With the rapid development of MEMS technology, the structure of MEMS devices has become more and more complex. It is very time-consuming and inefficient to use its original model to directly carry out system-level modeling and simulation. In order to improve the simulation efficiency, the original model is generally processed, and a certain order reduction method is adopted to greatly reduce the degree of freedom while maintaining the input and output characteristics basically unchanged, and establish a low-order model that can reflect the characteristics of the original model, also known as Macro model or polycondensation model, the degree of freedom reduction process is called the reduced-order modeling process. [0003] The state equation of th...

Claims

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Application Information

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IPC IPC(8): G06F17/50
Inventor 苑伟政徐景辉常洪龙马炳和谢建兵吕湘连
Owner NORTHWESTERN POLYTECHNICAL UNIV
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