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Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system

A coaxial cable, anomaly detection technology, applied in the direction of measuring device, measuring electricity, fault location, etc.

Inactive Publication Date: 2008-12-17
TOKYO ELECTRON LTD
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Problems solved by technology

Therefore, the processing unit has to be stopped

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  • Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system
  • Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system
  • Abnormal detection system and method of coaxial cable, and processing apparatus equipped with the abnormal detection system

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Embodiment Construction

[0036] Hereinafter, an embodiment of the present invention will be specifically described with reference to the drawings.

[0037] FIG. 1 is a configuration diagram showing an example of a processing device including a coaxial cable abnormality detection system according to an embodiment of the present invention.

[0038] As shown in FIG. 1 , a processing device equipped with an abnormality detection system for a coaxial cable according to an embodiment includes: an RF generator 1 that generates high-frequency power; a processing device 2 that performs processing on a substrate to be processed; A coaxial cable 3 that supplies high-frequency power from 1 to a power supply line of the processing device 2; a matching unit 4 that matches the impedance of the coaxial cable 3 with that of the processing device 2; a controller 5 that controls the matching unit 4; and The detector 6 detects the occurrence of an abnormality in the coaxial cable.

[0039] As an example of the processin...

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Abstract

The invention relates to an abnormal detection system for coaxial cable, an abnormal detection method thereof, and processing equipment with the abnormal detection system. The invention provides the abnormal detection system for coaxial cable, which is capable of detecting minimal abnormity such as bucking or crack without stopping the processing equipment. The abnormal detection system comprises: the coaxial cable, which one end is connected with the output of a RF generator, and which the other end is connected with the input of an adapter; a first reflection wave detecting unit for detecting the reflection wave R output from the RF generator; a second reflection wave detecting unit for detecting the reflection wave r input into the adapter of the coaxial cable; and a detector for comparing the reflection wave R with the reflection wave r, when R>r, and the difference between the reflection wave R and the reflection wave r exceeds a specified value, performing the detection of the abnormity in the coaxial cable.

Description

technical field [0001] The present invention relates to a coaxial cable abnormality detection system for detecting an abnormality of the coaxial cable, an abnormality detection method thereof, and a processing device including the abnormality detection system. Background technique [0002] In the manufacture of flat panel displays and semiconductor devices, there are processes using a processing device using high-frequency power, such as plasma etching or CVD film formation. High-frequency power is generated by an RF generator, and the generated high-frequency power is input to a coaxial cable as a power supply line, passed through a matching unit that matches the impedance of the coaxial cable to the impedance of the processing device, and then supplied to the processing device. [0003] A processing device used in the manufacture of a flat panel display or a semiconductor device is large, and the distance from a matching unit installed in the main body of the processing de...

Claims

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Application Information

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IPC IPC(8): G01N23/18
CPCG01R11/25G01R27/06G01R31/083G01R31/58
Inventor 赤松弘邦水谷敦
Owner TOKYO ELECTRON LTD
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