Method for verifying whether detection result of detection device is correct or not

Abstract

The invention discloses a method for verifying whether a detection result of a detecting device is right, which relates to the detecting technology of semiconductors. The method comprises a clip which is equipped with a work area and a nominal area, the clip comprises a plurality of bit lines and word lines, the nominal area does not participate in a circuit work of the work area, and the bit lines or the word lines of the nominal area are connected with fuse wires and are connected with preinstall bit lines or word line circuits of the work area. The preinstall bit lines or the word lines of the work area fail through that the fuse wires are interrupted, the bit lines or the word lines of the nominal area which are connected with the fuse wires replace the preinstall bit lines or preinstall word lines of the work area, thereby obtaining an invalid practical physical address. The clip is detected by the detecting device, thereby outputting a detected physical address, and whether the detecting device is natural can be detected through comparing the practical physical address and the detected physical address. Compared with the prior art, the fuse wires are bigger and are conveniently interrupted by focusing ions or lasers. The design of a fuse wire circuit is added in the nominal area, and the whole area of the clip does not need to be increased.

Description

technical field [0001] The invention relates to a semiconductor detection process, in particular to a method for verifying whether the detection result of a detection device is correct. Background technique [0002] For problematic memory products reported by customers, it is often necessary to conduct physical failure analysis to find out the problem. The process of physical failure analysis is to detect the faulty storage unit by testing equipment, and output the physical address of the storage unit on the memory chip; then perform various analyzes according to the output physical address, and finally find out the problem. But sometimes, due to the error of the program design of the detection device itself, the output physical address is wrong. If you analyze it based on the wrong physical address, you will get nothing, and you will not be able to find the real problem. Therefore, before analyzing the cause of failure, it is often necessary to verify whether the detectio...

AI Technical Summary

Problems solved by technology

When there are many metal layers on the chip, the underlying structure cannot be seen, so when dotting, it is impossible to determine the specific location of the dot

If you do it rashly, for static memory, it is easy to connect the power supply voltage line and the ground point of the chip, which may eventually cause the power supply voltage of the chip to be pulled down, which will cause the entire chip test to fail.

For dynamic random access memory, each memory unit on the chip is too small, and it is easy to damage the upper metal wire by dotting, and it is impossible to achieve precise positioning, and the scope of influence is too large

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