System and method for detecting defect with multi-step output function

Abstract

The invention provides a defect detection system with multi-step output functions and a method thereof. A multi-step signal detection technique is used for detecting the defect of an integrated circuit; the defect detection system uses an A / D converter to convert an analog reading signal into an outgoing code with a plurality of bits; the detect detection method comprises an open circuit detection method and a short circuit detection method; the open circuit detection method and short circuit detection method respectively comprise a correction method and a detection method; and the correctionmethod is that a prearranged reference voltage required by the A / D converter in the detection method is arranged according to a prearranged code. The detection method uses the prearranged reference voltage and the prearranged code to generate the outgoing code with a plurality of bits and carries out the defect state classification according to the detection result the outgoing code detects whether the integrated circuit is provided with detects of open circuit or short circuit.

Description

technical field [0001] The invention relates to a defect detection system and method for semiconductor circuit detection, in particular to a defect detection system and method with multi-stage output function for semiconductor circuit detection. Background technique [0002] In the manufacturing process of integrated circuits, such as doping process, deposition process, pattern shielding process, and metallization process, the factors of various processes are often interlocking, and the defects generated in the previous process step are often in the next or Corresponding defects are also produced in the subsequent process, so as to cause problems in the yield of the final product. With the continuous shrinking of the component size and the continuous improvement of the circuit integration in the semiconductor process, extremely small defects or particles The impact of integrated circuit quality is also becoming more and more serious. Therefore, in order to maintain the stab...

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Problems solved by technology

Therefore, the functional flexibility of the defect detection system 100 is quite limited. That is to say, in some detection situations, if it is required to provide multi-stage output signals for failure analysis, the existing defect detection system 100 cannot meet the requirements.

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