Inspection device, inspection method, inspection system and method of manufacturing color filter

Abstract

The invention relates to an inspection device, an inspection method, an inspection system and a manufacturing method of a color filter. The inspection device of the present invention includes: a linear irregularity detecting section for detecting linear irregularities individually in an image L of dots on a substrate being inspected by projecting light from a first direction and in an image R of the dots by projecting light from a second direction, which differs from the first direction; a specific-cycle irregularity extracting section for extracting linear irregularities detected at predetermined intervals T in the individual mages L and R, the intervals being taken vertical to the linear irregularities on the substrate; and a detection-target-irregularity extracting section for extracting a linear irregularity detected in both the images L and R as a detection-target linear irregularity. The device therefore is capable of detecting only linear irregularities of a specific cycle which are caused by the presence of dots having irregular thickness when compared to a dot with normal thickness.

Description

technical field [0001] The present invention relates to an inspection device and the like for detecting linear irregularities generated in an inspection object at a specific period from an image taken of an undulating end portion of the inspection object having undulations. Background technique [0002] In recent years, the demand for liquid crystal display devices tends to increase while increasing in size. However, in order to further popularize liquid crystal display devices, it is necessary to reduce the cost. In particular, in liquid crystal display devices, there is an increasing demand for cost reduction of color filters (color filters), which have a high proportion of cost. [0003] Recently, a method of forming a color filter based on an inkjet method is attracting attention. In this forming method, a color filter is formed by ejecting R (red), G (green), and B (blue) inks from nozzles of an inkjet head to each pixel. The inkjet method is characterized by a small...

AI Technical Summary

Problems solved by technology

[0020] However, the technique of Patent Document 1 is not suitable for detecting the appearance of streaks at a predetermined specific period because the accumulated data is generated by cutting out a part of the two-dimensional data.

In addition, in Patent Document 1, since one-sided inclination irregularity is not taken into consideration at all, there is a problem that one-sided inclination irregularity (defect in handling of good products) is mistakenly detected as a defect

[0021] In addition, in the technique of Patent Document 2, since the shape of the surface of the object is analyzed using the period position at which the frequency spectrum has a maximum value, it is not suitable for performing evaluation involving a predetermined specific period

In addition, in Patent Document 2, as in the above-mentioned technique of Patent Document 1, one-sided inclination irregularity is not considered at all, so there is a problem of being affected by one-sided inclination irregularity.

[0022] In addition, since the brightness difference between the part where streaks occur and the part where no streaks do not occur is small, it is difficult to detect streaks after binarization

That is, the technique of Patent Document 3 is not suitable for streak inspection

In addition, since the patent document 3 does not consider the one-sided tilt irregularity at all, this method may falsely detect the one-sided tilt irregularity

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