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41results about How to "Lower turn-on resistance" patented technology

Longitudinal short-opening grid channel-type HEMT device and preparation method thereof

The present invention relates to the field of a semiconductor device and provides a longitudinal short-opening grid channel-type HEMT device and a preparation method thereof. The HEMT device comprises a substrate, a buffer layer, a first GaN layer, a second GaN layer, a second barrier layer, a first barrier layer, a dielectric layer, a source electrode, a drain electrode and a grid electrode, wherein the buffer layer is positioned on the substrate; the first GaN layer is positioned on the buffer layer; one side, whic is deviated from the buffer layer, of the first GaN layer is provided with a groove; the second GaN layer and the second barrier layer are sequentially embedded into the groove; the first barrier layer is positioned on the first GaN layer except for the groove; the dielectric layer is positioned on the first barrier layer and the second barrier layer; the source electrode and the drain electrode are in contact with the first GaN layer and the lateral surfaces of the source electrode and the drain electrode are sequentially in contact with the first barrier layer and the dielectric layer from bottom to top; and the grid electrode is in contact with the dielectric layer. According to the present invention, a normally-closed type operation mode of the HEMT device can be obtained; when a large threshold value voltage is realized, on resistance of the device is effectively reduced; and the grid electrode structure also has the characteristics of small capacitor, high switching speed of the device and the like.
Owner:DALIAN UNIV OF TECH

Graphene buried heat radiation layer and vertical channel GaN MISFET cellular structure and preparation method

The invention discloses a graphene buried heat radiation layer and vertical channel GaN MISFET cellular structure and a preparation method; the cellular structure comprises a substrate, an AIN isolation layer, a graphene buried heat radiation layer, an AIN nucleating layer, a GaN buffer layer, a n type heavy doping GaN layer, a n type GaN layer, a P type GaN electronic stop layer, a non-doping GaN layer and an AlGaN barrier layer arranged from bottom to top; a cellular structure grating groove hole extends from the cellular structure top to the n type GaN layer; the gating groove hole side wall and bottom are respectively provided with a gate medium layer. An existing normally off GaN MISFET device cannot simultaneously have even and stable large threshold-voltage, low device conductive resistance and high switching rate; aiming at the normally off type GaN base III-V family material power device, the normally off GaN MISFET cellular structure with the vertical grid structure and the preparation method are provided so as to solve said problems, thus realizing GaN MISFET device stable large threshold-voltage normally off operations, and effectively reducing the device starting conduction resistance.
Owner:BEIJING HUAJINCHUANGWEI ELECTRONICS CO LTD

Normally-closed GaN-based MOSFET structure with high threshold voltage and high conduction performance and fabrication method thereof

The invention relates to the technical field of semiconductor, in particular to a normally-closed GaN-based MOSFET structure with a high threshold voltage and high conduction performance and a fabrication method thereof. The fabrication method of the normally-closed GaN-based MOSFET structure with the high threshold voltage and high conduction performance comprises the following steps of firstly,providing a required substrate, sequentially and epitaxially growing a stress buffer layer, a GaN buffer layer, an AIN thin layer and an AlGaN thin layer on the substrate, and reserving the AlN thin layer and the AlGaN thin layer on a grid region by etching to obtain a substrate for epitaxy of a selection region; secondly, sequentially selecting a regional epitaxial GaN channel layer, a AIN insertion layer and a AIGaN barrier layer on the substrate to form a groove structure; and finally, depositing a grid dielectric layer, covering grid metal on a groove channel grid dielectric layer, and covering two ends of the grid with metal to form a source and a drain. By the fabrication method, the threshold voltage and the grid region mobility can be effectively improved, the channel resistance isreduced, and the conduction performance of the GaN MOSFET device is improved.
Owner:SUN YAT SEN UNIV

Radio frequency laterally diffused metal oxide semiconductor (LDMOS) device with thermometal silicide and manufacturing method

The invention discloses a radio frequency laterally diffused metal oxide semiconductor (LDMOS) device with thermometal silicide and a manufacturing method. A P-shaped silicon substrate is provided with P-shaped epitaxy. A N-shaped low doped drain region, a P trap and a N-shaped heavy doped drain region are arranged in the P-shaped epitaxy. A N-shaped heavy doped source region and a P-shaped heavy doped lead out region are arranged in the P trap. A drain electrode titanium silicide layer is arranged on the top of the N-shaped heavy doped source region. A source electrode titanium silicide layer is arranged on the top of the P-shaped heavy doped lead out region and the N-shaped heavy doped source region. A grid electrode titanium silicide layer is arranged on the top of a polycrystalline silicon grid electrode. Thickness of the grid electrode titanium silicide layer is larger than thickness of the drain electrode titanium silicide layer and the source electrode titanium silicide layer. Titanium silicide of a grid electrode is thicker, square resistance of the grid electrode is reduced, and normal thickness titanium silicide on a source electrode and a source electrode avoids electricity leakage to caused by junction penetration of source drain and the trap.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Transistor and forming method thereof

Provided are a transistor and a forming method thereof. The transistor comprises a semiconductor substrate, a groove located in the semiconductor substrate, a gate dielectric layer located on the lateral wall and the bottom surface of the groove, a gate electrode layer located on the surface of the gate dielectric layer, a source region and a drain region. The groove is formed by a first sub groove and a second sub groove located below the first sub groove, wherein the second sub groove is communicated with the first sub groove, an opening of the first sub groove is larger than that of the second sub groove, the lateral wall of the first sub groove is inclined relative to the surface of the semiconductor substrate, and the lateral wall of the second sub groove is perpendicular to the surface of the semiconductor substrate. The gate electrode layer fully fills the groove and the surface of the gate electrode layer is level to that of the semiconductor substrate. The source region is located in the semiconductor substrate on two sides of the groove. The drain region is located in the semiconductor substrate on one side opposite to the groove and is opposite to the second sub groove. The transistor is stable in threshold voltage and good in performance.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Method for fabricating radio frequency ldmos devices with double metal silicides

The invention discloses a radio frequency laterally diffused metal oxide semiconductor (LDMOS) device with thermometal silicide and a manufacturing method. A P-shaped silicon substrate is provided with P-shaped epitaxy. A N-shaped low doped drain region, a P trap and a N-shaped heavy doped drain region are arranged in the P-shaped epitaxy. A N-shaped heavy doped source region and a P-shaped heavy doped lead out region are arranged in the P trap. A drain electrode titanium silicide layer is arranged on the top of the N-shaped heavy doped source region. A source electrode titanium silicide layer is arranged on the top of the P-shaped heavy doped lead out region and the N-shaped heavy doped source region. A grid electrode titanium silicide layer is arranged on the top of a polycrystalline silicon grid electrode. Thickness of the grid electrode titanium silicide layer is larger than thickness of the drain electrode titanium silicide layer and the source electrode titanium silicide layer. Titanium silicide of a grid electrode is thicker, square resistance of the grid electrode is reduced, and normal thickness titanium silicide on a source electrode and a source electrode avoids electricity leakage to caused by junction penetration of source drain and the trap.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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