Modularized 6 freedom degree active vibration isolation platform

Abstract

The invention discloses a modularized six-freedom-degree driving vibration isolation platform which comprises four two-freedom-degree driving vibration isolation modules, an object stage and a base, wherein lower connecting plates of the four two-freedom-degree driving vibration isolation modules are respectively arranged on the four corners of the base, L-shaped connecting plates of the four two-freedom-degree driving vibration isolation modules are connected with the object stage, and output shafts of horizontal actuators of the adjacent two two-freedom-degree driving vibration isolation modules of the four two-freedom-degree driving vibration isolation modules are vertical. The driving vibration isolation platform is designed by adopting a module assembling structure, and each module can be looked as an independent vibration isolation stabilizing device which can realize driving and driven combined vibration control in vertical and horizontal directions. Under small-amplitude and low-frequency environment, each module can bear the two-freedom-degree directional driving vibration control of about 500 kg loads which are 27 times of the weight of the module, and the whole vibration isolation platform can bear the six-freedom-degree directional driving vibration control of 2000 kg loads.

Description

technical field [0001] The invention relates to a vibration isolation platform, more particularly, to a six-degree-of-freedom active vibration isolation platform designed with a modular assembly structure and having a large bearing capacity. Background technique [0002] The requirements for the vibration isolation and stability control platform of optical precision instruments and equipment are prominently reflected in large bearing capacity, wide frequency range and high precision. Under the action of broadband and large load, the vibration amplitude of the platform is often required to be controlled at the micron level. Because the working environment of the vibration isolation and stability control platform is generally more complicated, there are vibration sources that are difficult to predict, and the resulting vibration, especially the slight vibration, is difficult to solve by ordinary methods. To make the vibration isolation and stabilization control platform meet ...

AI Technical Summary

Problems solved by technology

Some actuators, such as common hydraulic actuators, can realize these two functions at the same time, but their structure may be more complicated than the parallel structure of active and passive components.

Images