Phase change memory device for multibit storage
A technology of phase-change storage and equipment, which is applied in information storage, static memory, read-only memory, etc., and can solve problems such as the impact of intermediate-level reading capabilities, weakening time and temperature stability, and difficulties
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[0025] Figures 3a-3d shows part of PCM device 10, with figure 1 and Figure 2a-2d Similar to the PCM device in , the PCM device 10 includes a heater 2 surrounded by a dielectric layer 6 and covered with a storage device 3 . exist Figures 3a-3d in, with figure 1 and Figure 2a-2d Similar to the case in , the memory device 3 has been programmed in four cases, and the memory device 3 includes a polycrystalline portion 4 and an amorphous portion 5 . Here, the narrow resistive region 11 protrudes from the upper edge of the heater 2 along the surface between the dielectric layer 6 and the storage device 3 . The narrow resistive region 11 is made of a conductive material, such as metal or doped polysilicon, and has a reduced thickness. Preferably, the narrow resistive region 11 is made of the same material as the heater 2, such as TiN, TiAlN, TiSiN. Alternatively, it can also consist of a different material. For example, the heater 2 may be made of TiAlN, while the narrow r...
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