Workpiece supporting device

A technology for supporting devices and workpieces, which is applied in the direction of furnace components, electrical components, conveyor objects, etc., and can solve the problems of the balance damage of workpiece W quality and gas flow, difficult correspondence, unstable support posture, etc.
CN101447445AInactive Publication Date: 2009-06-03DENSO CORP
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
DENSO CORP
Publication Date
2009-06-03
Estimated Expiration
Not applicable · inactive patent

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Abstract

A workpiece supporting device is capable of transferring without damage and blemish through floating the workpiece using gas. An air permeability multihole sheet (14) is supported by mounting components (13) arranged at intervals of a prescribed distance, the bottom side of the air permeability multihole sheet (14) is divided to a close space (15) which is connected with a source (16) for supplying the pressure gas. The air permeability multihole sheet (14) is projected at each position mounting the mounting components (13) in convexity, and ensures gas holdup in a space (17) formed on the mounting components (13).
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Description

technical field

[0001] The present invention relates to a support device for workpieces such as semiconductor substrates and liquid crystal substrates, and relates to a workpiece support device that uses gas to suspend the workpiece so that it can be transported without damage or defect. Background technique

[0002] In the production process such as the field of precision equipment, even a small scratch or stain on the workpiece will become a cause of failure, so it is not allowed, so it is generally carried out by using gas to support the workpiece in a non-contact state. mode of delivery.

[0003] For example, Patent Document 1 discloses an air-suspension conveying device. However, the air-suspension conveying device sprays air from an air-suspension unit disposed below the flat substrate to suspend the flat substrate and move it forward using a feeding mechanism. Near the downstream end of the air suspension unit at the front end of the conveying direction of the flat s...

Claims

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