Workpiece supporting device

Abstract

A workpiece supporting device is capable of transferring without damage and blemish through floating the workpiece using gas. An air permeability multihole sheet (14) is supported by mounting components (13) arranged at intervals of a prescribed distance, the bottom side of the air permeability multihole sheet (14) is divided to a close space (15) which is connected with a source (16) for supplying the pressure gas. The air permeability multihole sheet (14) is projected at each position mounting the mounting components (13) in convexity, and ensures gas holdup in a space (17) formed on the mounting components (13).

Description

technical field [0001] The present invention relates to a support device for workpieces such as semiconductor substrates and liquid crystal substrates, and relates to a workpiece support device that uses gas to suspend the workpiece so that it can be transported without damage or defect. Background technique [0002] In the production process such as the field of precision equipment, even a small scratch or stain on the workpiece will become a cause of failure, so it is not allowed, so it is generally carried out by using gas to support the workpiece in a non-contact state. mode of delivery. [0003] For example, Patent Document 1 discloses an air-suspension conveying device. However, the air-suspension conveying device sprays air from an air-suspension unit disposed below the flat substrate to suspend the flat substrate and move it forward using a feeding mechanism. Near the downstream end of the air suspension unit at the front end of the conveying direction of the flat s...

AI Technical Summary

Problems solved by technology

In order to stably support such a workpiece W, finer adjustment of the gas flow rate is required. On the other hand, anti-vibration metal Pm and sintered plate Sp are limited in structure and flow control, and it is difficult to cope with it.

[0012] The current situation is that, for example, when a base pressure of 0.1 MPa is applied, the flow rate of the gas ejected from the support plate 4 such as the anti-vibration metal Pm and the sintered plate Sp is set to 0.5 NL / min / cm 2 Below, it is very difficult, and at this flow rate, in recent years, the balance of the mass of the workpiece W and the gas flow rate has been disrupted in thin-film workpieces W on the order of 10 μm in thickness, so-called wrinkles and bulges, etc., have occurred, and the supporting posture become unstable (cf. Figure 5 )

[0013] In addition, the support surface is the anti-vibration metal Pm and the sintered plate Sp, and if it comes into contact with the workpiece W whose posture becomes unstable, it may cause flaws on the surface of the workpiece W.

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