Workpiece supporting device

A technology for supporting devices and workpieces, which is applied in the direction of furnace components, electrical components, conveyor objects, etc., and can solve the problems of the balance damage of workpiece W quality and gas flow, difficult correspondence, unstable support posture, etc.

Inactive Publication Date: 2009-06-03
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to stably support such a workpiece W, finer adjustment of the gas flow rate is required. On the other hand, anti-vibration metal Pm and sintered plate Sp are limited in structure and flow control, and it is difficult to cope with it.
[0012] The current situation is that, for example, when a base pressure of 0.1 MPa is applied, the flow rate of the gas ejected from the support plate 4 such as the anti-vibration metal Pm and the sintered plate Sp is set to 0.5 NL/min/cm 2 Below, it is very difficult, and at th

Method used

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Examples

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Embodiment Construction

[0040] Hereinafter, one embodiment will be described in detail with reference to the drawings for the workpiece supporting device of the present invention.

[0041] figure 1 , figure 2 The middle part schematically shows the main part of the support device 10 for the thinned film-shaped workpiece W as the workpiece.

[0042] The support device 10 includes an airtight frame member 12 disposed on the base 11, at least one mounting member 13 disposed on the base 11 inside the frame member 12, and a porous air-permeable frame supported by the frame members 12 and the mounting member 13. The sheet 14 and the pressurized gas supply source 16 for supplying pressurized gas to the sealed space 15 partitioned by the air permeable porous sheet 14 , the frame member 12 and the base 11 .

[0043] The base 11 is a flat member made of a square member with a bottom area at least large enough to place the entire workpiece W to be supported and transported, and a frame member 12 protrudes f...

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Abstract

A workpiece supporting device is capable of transferring without damage and blemish through floating the workpiece using gas. An air permeability multihole sheet (14) is supported by mounting components (13) arranged at intervals of a prescribed distance, the bottom side of the air permeability multihole sheet (14) is divided to a close space (15) which is connected with a source (16) for supplying the pressure gas. The air permeability multihole sheet (14) is projected at each position mounting the mounting components (13) in convexity, and ensures gas holdup in a space (17) formed on the mounting components (13).

Description

technical field [0001] The present invention relates to a support device for workpieces such as semiconductor substrates and liquid crystal substrates, and relates to a workpiece support device that uses gas to suspend the workpiece so that it can be transported without damage or defect. Background technique [0002] In the production process such as the field of precision equipment, even a small scratch or stain on the workpiece will become a cause of failure, so it is not allowed, so it is generally carried out by using gas to support the workpiece in a non-contact state. mode of delivery. [0003] For example, Patent Document 1 discloses an air-suspension conveying device. However, the air-suspension conveying device sprays air from an air-suspension unit disposed below the flat substrate to suspend the flat substrate and move it forward using a feeding mechanism. Near the downstream end of the air suspension unit at the front end of the conveying direction of the flat s...

Claims

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Application Information

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IPC IPC(8): H01L21/683H01L21/677B65G51/02B65G49/07B65G49/06
CPCB65G49/065B65G51/03B65G2249/045H01L21/67784
Inventor 乡古伦央谷口敏尚坂井田敦资石川富一冈本圭司
Owner DENSO CORP
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