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Thermosetting resin composition, method for forming antihalation film of solid-state imaging device, antihalation film of solid-state imaging device, and solid-state imaging device

A resin composition and thermosetting technology, which is applied in the field of thermosetting resin compositions, can solve problems such as increased maintenance times, inability to form desired shapes, and reduced yield

Inactive Publication Date: 2009-06-24
JSR CORPORATIOON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above-mentioned anti-reflection film has the following disadvantages: in the baking step for cross-linking and curing the coated material, a part of the dye is sublimated from the anti-reflection film, and the anti-halation effect is significantly reduced. dye, the dye floats to the protective film, and the microlenses formed on the anti-halation film cannot form the desired shape, etc.
In addition, even the one-component type has the problem of thickening after about a week at room temperature, curing around the device, increased maintenance times, and decreased yield. Therefore, antihalation films with good storage stability at room temperature are required

Method used

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  • Thermosetting resin composition, method for forming antihalation film of solid-state imaging device, antihalation film of solid-state imaging device, and solid-state imaging device
  • Thermosetting resin composition, method for forming antihalation film of solid-state imaging device, antihalation film of solid-state imaging device, and solid-state imaging device
  • Thermosetting resin composition, method for forming antihalation film of solid-state imaging device, antihalation film of solid-state imaging device, and solid-state imaging device

Examples

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Embodiment

[0281] Synthesis examples and examples are given below to further describe the present invention in detail, but the present invention is not limited by the following examples.

Synthetic example 1

[0283] 6 parts by weight of 2,2'-azobis(isobutyronitrile) and 200 parts by weight of propylene glycol monomethyl ether acetate were added to a flask equipped with a condenser and a stirrer. Next, 18 parts by weight of styrene (ST) and 82 parts by weight of methylglycidyl methacrylate (M-GMA) were added to carry out nitrogen substitution, and then slow stirring was started. The temperature of the solution was raised to 95° C. and kept at this temperature for 3 hours to obtain a polymer solution containing the copolymer [A-1]. The solid content concentration of the obtained polymer solution was 33.7% by weight, and the polystyrene-equivalent weight average molecular weight of the copolymer [A-1] was 8,600.

[0284] Here, the polystyrene-equivalent weight average molecular weight is measured by gel permeation chromatography (GPC). The same applies to the following.

Synthetic example 2

[0286] 1 part by weight of 2,2'-azobis(isobutyronitrile) and 200 parts by weight of propylene glycol monomethyl ether acetate were added to a flask equipped with a condenser and a stirrer. Then add 35 parts by weight of styrene, 35 parts by weight of methacrylic acid tricyclic [5.2.1.0 2，6 ] decan-8-yl ester (DCM) and 30 parts by weight of methyl glycidyl methacrylate, carry out nitrogen replacement, and then start to slowly stir. The temperature of the solution was raised to 95° C. and kept at this temperature for 3 hours to obtain a polymer solution containing the copolymer [A-2]. The solid content concentration of the obtained polymer solution was 32.8% by weight, and the polystyrene-equivalent weight average molecular weight of the copolymer [A-2] was 20,000.

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Abstract

A thermosetting resin composition comprising a polymer having a methylglycidyl group and an ultraviolet absorbent. This thermosetting resin composition has excellent storage stability and forms an antihalation film which can effectively suppress diffused reflection light from a foundation substrate in an exposure step for forming a color filter or microlens in a solid-state imaging device, has high heat resistance and does not have a rough surface even when it is subjected to dry etching.

Description

technical field [0001] The present invention relates to a thermosetting resin composition, a method for forming an antihalation film of a solid-state imaging element, an antihalation film of a solid-state imaging element, and a solid-state imaging element. Background technique [0002] The solid-state imaging elements include MOS (Metal Oxide Semiconductor) type, CCD (Charge Coupled Device) type, etc., which are respectively a one-dimensional solid-state imaging element and a two-dimensional solid-state imaging element. Examples of the former include facsimile machines and the like, and examples of the latter include video cameras and the like. [0003] With the development of digitalization in recent years, users have demanded that the above-mentioned solid-state imaging devices have high quality, and they have also been required to have high image quality. One such example is the increase in the number of pixels of digital cameras. [0004] Solid-state imaging devices ar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08G59/20C08K5/3475C08L63/00G03F7/11H01L27/14
CPCH01L27/14627C08K5/005G03F7/091C08K5/3475H01L27/14621H01L27/14685G03F7/0007C08L63/00C08G59/20
Inventor 吉泽纯司
Owner JSR CORPORATIOON