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End inclination angle measuring method, inspecting method and inspecting apparatus for objects having undulations, method for determining the position of illuminating means, irregularity inspecting ap

A detection method and a measurement method technology, which can be applied to measurement devices, optical testing flaws/defects, and optical devices, etc., and can solve the problems of reduced detection accuracy, deviation of detection accuracy in the visual range, and influence of detection accuracy.

Inactive Publication Date: 2009-06-24
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this method, the position setting method of the camera and lighting has a great influence on the detection accuracy
That is, if the position of the camera is inappropriate, problems such as decreased detection accuracy, deviation of detection accuracy over the entire visible range, etc.

Method used

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  • End inclination angle measuring method, inspecting method and inspecting apparatus for objects having undulations, method for determining the position of illuminating means, irregularity inspecting ap
  • End inclination angle measuring method, inspecting method and inspecting apparatus for objects having undulations, method for determining the position of illuminating means, irregularity inspecting ap
  • End inclination angle measuring method, inspecting method and inspecting apparatus for objects having undulations, method for determining the position of illuminating means, irregularity inspecting ap

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Experimental program
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Embodiment approach 1

[0087] figure 1 It is a block diagram showing the structure of the detection device 200 of this embodiment. exist figure 1 In the illustrated embodiment, the detection device 200 of the present invention includes a calibration device (correction unit, feature point detection unit, inclination calculation unit) 100, a first camera (detection unit, imaging unit) 201, a first light source (illumination unit) 202 . Auxiliary recording device 107 , image output device 108 , unevenness defect judgment device (detection unit) 203 .

[0088] The calibration device (correction unit, feature point detection unit, inclination calculation unit) 100 includes a second camera 103 , a second light source 102 , and an image processing device 106 . A color filter substrate (object to be inspected) 101 is loaded on a stage 104 , wherein the stage 104 can reciprocate in a uniaxial direction parallel to the surface of the color filter substrate 101 .

[0089] image 3 It is a plan view illustr...

Embodiment approach 2

[0179] In Embodiment 1, an inflection point is detected by one shot. Embodiment 2 can achieve better reproducibility effect and reliability effect, which will be described below. Such as Figure 4 As shown, the projection data only exists in the interval of the pixel period, so in order to further improve the reproducibility and reliability of the method for determining the position of the lighting device of the present invention, it is preferable to obtain the data within the pixel period. Therefore, in the present embodiment, in step S103, the stage 104 is moved, and interpolation processing is performed on the data within the pixel period. Figure 11 It is a flowchart illustrating the procedure of interpolation processing of data within a pixel period.

[0180] First, the number of shots N is read into the second camera 103, and the count i is set to 0 (S200). Wherein, "count i" is used to manage the number of shootings so as to realize the counting of the required numbe...

Embodiment approach 3

[0186] In Embodiment 1 and Embodiment 2, the configuration in which the optimal position of the first light source (illumination unit) 202 is uniquely determined is adopted. However, the present invention is not limited thereto. The following structure may also be adopted, that is, the relative positions of the first light source (illumination part) 202, the above-mentioned object 101 and the first camera (detection part, imaging part) 201 are determined so that the inclination angle of the object 101 is larger than the above-mentioned The portion at the inclined angle of the end reflects the irradiation light from the first light source (illumination unit) 202 , and makes the reflected light enter the above-mentioned first camera (detection unit, imaging unit) 201 .

[0187] exist Figure 14 represents the above relative positional relationship. As shown in the figure, the relative positions of the first light source (illumination unit) 202, the color filter substrate (subj...

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Abstract

Provided is an end inclination angle measuring method for an object having undulations. The end inclination angle measuring method comprises the step (A) of irradiating the object with a light, the step (B) of detecting the reflected light distribution of the object, the step (C) of determining a characteristic point of the reflected light distribution from the detection result of the reflected light distribution, and the step (D) of determining, on the basis of the irradiation angle of the light at the step (A) with respect to a position on the object corresponding to the characteristic point and the detection angle of a reflected light at the step (B) according to the position on the object corresponding to the characteristic point, an end inclination or the inclination near the end of the undulations. Further provided are a method for determining an end inclination angle or an inclination angle near the end of undulations in an object having the undulations, and a method for inspecting the difference in thickness between individual undulations precisely on the basis of an end inclination angle.

Description

technical field [0001] The invention relates to a method for measuring an end inclination, a method for detecting an object with undulation and a detection device, a method for determining an illumination position, a device for detecting uneven defects, and a device for determining the illumination position. Background technique [0002] In recent years, since liquid crystal display devices tend to increase in size, demand tends to increase. In order to further popularize liquid crystal display devices, cost reduction is required. Since the cost of the color filter accounts for a large proportion, it is particularly necessary to reduce its cost. It is particularly important to improve the yield which is directly related to the cost, and therefore, it is urgently required to detect the defect of the color filter with high precision. [0003] One of the biggest problems in color filters is that streaks are generated in specific directions due to relative film thickness diffe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26G01B11/06G01M11/00G01N21/88
Inventor 井殿多闻
Owner SHARP KK