Sheet-like material conveying device

Abstract

The invention provides a sheet-like material conveying device (10) including an air table unit (14) that has an air table (22) for supporting a glass substrate (12) by supplying air to the lower side of the glass substrate (12) and also has fan devices (24) for supplying positive pressure air to the air table (22). The air table unit (14) is elongate in the conveyance direction and has a fan device (24) placed for each length of the table unit, with each length equivalent to about three to ten times the width of the air table unit (14). Each fan unit (24) is constructed from a box-like receiving section (24A) provided connected to the lower side of the air table (22) and a fan (28) placed inside the receiving section (24A).

Description

Technical field [0001] The present invention relates to a thin-plate-shaped material conveying device for non-contact supporting thin-plate-shaped materials such as large and thin glass substrates used in flat panel displays (FPD) such as liquid crystal display (LCD) panels and plasma displays (PDP) . Background technique [0002] Since the glass substrate of flat panel displays such as liquid crystal displays and plasma displays has a small flaw or dust, it will have a great impact on quality. Therefore, in the transportation of such glass substrates, it is required to maintain the glass substrate in a nearly flat shape. And smoothly convey along the predetermined conveying surface, so as not to produce defects or attach foreign matter on the surface of the glass substrate. [0003] On the other hand, the size of glass substrates for liquid crystal displays is becoming larger and larger. For example, in the 8th generation, the size is W2200mm×L2500mm, which is very thin with a t...

AI Technical Summary

Problems solved by technology

Therefore, there is a problem of easy sliding between the glass substrate and the roller

[0016] In addition, the upper end of the upper roller of the pneumatic table is provided with a driving unit higher than the lower surface of the glass substrate. Although this can increase the frictional force between the glass substrate and the roller, it cannot keep the glass substrate close to a flat surface. the shape of the problem

In addition, if the rotational acceleration and deceleration of the rollers are reduced, the slippage between the glass substrate and the rollers can be suppressed to some extent, but there is a problem that the transport efficiency decreases.

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