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Comb condenser type dual-spindle accelerometer

A biaxial accelerometer and comb-tooth capacitor technology, which is applied in the direction of measuring acceleration, speed/acceleration/shock measurement, TV, etc., can solve the problems of poor stability of the accelerometer, low yield, difficult processing, etc., to reduce difficulty and facilitate Capacitance detection, the effect of high resolution

Inactive Publication Date: 2009-08-12
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a comb-tooth capacitive dual-axis accelerometer to solve the problems of poor stability, low precision, difficult processing and low yield of accelerometers in traditional technology.

Method used

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  • Comb condenser type dual-spindle accelerometer
  • Comb condenser type dual-spindle accelerometer
  • Comb condenser type dual-spindle accelerometer

Examples

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Embodiment Construction

[0024] Such as figure 1 shown. The comb-tooth capacitive dual-axis accelerometer includes a substrate 1, the material of which is borosilicate glass, on the substrate 1 there is a sensitive mass 2 with a symmetrical shape to the center, and the material of the sensitive mass 2 is heavily doped conductor silicon The disc is made by MEMS technology, and the four peripheries of the sensitive mass 2 are respectively equipped with detachable fixed combs 3, 4, 5, 6, fixed combs 3, 4, 5, 6 and the sensitive mass The corresponding peripheries of 2 are parallel and symmetrical to each other along the center, and there are multiple sets of movable comb teeth 7, 8, 9, 10 between each periphery of the sensitive mass 2 and the corresponding fixed comb teeth 3, 4, 5, 6, The distance ratio of the movable comb teeth 7, 8, 9, 10 to the fixed comb teeth on both adjacent sides is 1:10, each movable comb tooth is parallel to the periphery of the corresponding sensitive mass 2, and along the The...

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Abstract

The invention relates to a comb capacitance type dual-axis accelerometer, which comprises a substrate; the substrate is provided with a sensitive mass block; the sensitive mass block is provided with fixing comb teeth respectively; movable comb teeth are also arranged between each periphery and corresponding fixing comb teeth of the sensitive mass block; four corners of the sensitive mass block are also connected with four support frames respectively; and the four support frames are symmetrical with the center of the sensitive mass block, and the other ends of the four support frames are connected to the substrate. The comb capacitance type dual-axis accelerometer has small volume and light weight, and can realize two-dimensional acceleration measurement with high sensitivity and resolution.

Description

technical field [0001] The invention relates to the field of micromechanical sensors, in particular to a comb-tooth capacitance type biaxial accelerometer. Background technique [0002] An accelerometer is an inertial sensor capable of measuring the acceleration force of an object. The acceleration force is the force acting on the object when the object is accelerating. The acceleration force can be a constant, such as gravity, or it can be a variable. MEMS accelerometers are accelerometers manufactured using MEMS technology. Due to the use of micro-electro-mechanical system technology, the size of the accelerometer is greatly reduced, and a MEMS accelerometer is only a fraction of the size of a fingernail. MEMS accelerometers have the advantages of small size, light weight, and low energy consumption. [0003] MEMS accelerometers with mature technology can be divided into four types: piezoelectric, piezoresistive, capacitive, and thermal. Among them, the capacitive micr...

Claims

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Application Information

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IPC IPC(8): G01P15/125B81B7/02B81C5/00B81C99/00
CPCG01P2015/082
Inventor 鲍路路孔德义李庄江儒龙林丙涛郭攀朱荣华熊剑平赵贵徐艳华陈池来程玉鹏
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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