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Method for restoring and reusing focusing coil

A technology of focusing coil and protective film, which is applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of high physical vapor deposition cost and unreusable focusing coil, etc., and achieve the effect of cost saving

Active Publication Date: 2009-09-02
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The present invention solves the problem that the prior art focusing coil cannot be reused, which makes the cost of physical vapor deposition very high

Method used

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  • Method for restoring and reusing focusing coil
  • Method for restoring and reusing focusing coil
  • Method for restoring and reusing focusing coil

Examples

Experimental program
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Effect test

Embodiment approach

[0031] refer to Figure 4 As shown, an embodiment of the method for repairing and reusing the focusing coil of the present invention includes:

[0032] Step s1, coating the inner wall of the fixing hole on the used focusing coil with a protective film;

[0033] Step s2, corroding the focusing coil;

[0034] Step s3, after removing the sputtering material attached to the surface of the outer ring of the focusing coil, coating a protective film on the surface of the outer ring;

[0035] Step s4, continue to corrode the focusing coil;

[0036] Step s5, after removing the sputtering material attached to the surface of the inner ring of the focusing coil, removing the inner wall of the fixing hole and the protective film on the surface of the outer ring;

[0037] Step s6, roughening the surface of the inner ring of the focusing coil;

[0038] In step s7, the focusing coil is cleaned to remove residues produced by the rough treatment.

[0039] Through research on the used focus...

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Abstract

The invention relates to a method for restoring and reusing a focusing coil, which comprises the following steps: coating a protecting film on the inner wall of a mounting hole of a used focusing coil; corroding the focusing coil to eliminate sputtering materials attached to the surface of an outer ring of the focusing coil; coating a protecting film on the surface of the outer ring of the focusing coil; continuously corroding the focusing coil to eliminate the sputtering materials attached to the surface of an inner ring of the focusing coil; eliminating the protecting film on the surface of the focusing coil; roughening the surface of the inner ring of the focusing coil; and cleaning the focusing coil to eliminate residues generated by the roughening treatment. With the method, the focusing coil can be reused in physical vapor deposition so as to save the cost.

Description

technical field [0001] The invention relates to a physical vapor deposition process, in particular to a method for repairing and reusing a focusing coil applied to physical vapor deposition. Background technique [0002] Physical Vapor Deposition (PVD, Physical Vapor Deposition) is generally used to form thin layers. For example, physical vapor deposition is commonly used to deposit thin layers used in semiconductor structures, and physical vapor deposition is particularly useful for depositing metallic materials. Physical vapor deposition processes are often referred to as sputtering processes because the process involves sputtering the desired material from a target and depositing the sputtered material onto a substrate to form the desired thin film. [0003] figure 1 An example diagram of equipment used in physical vapor deposition. refer to figure 1 As shown, apparatus 110 is an ionic metal plasma (IMP) apparatus that includes a chamber 112 having sidewalls 114, typi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/02
Inventor 姚力军周友平汪涛刘庆
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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