Flexible rose work method and cutter for ring body surface used by magnetic-control sputtering ring piece

Abstract

The invention discloses a flexible rose work method and cutter for ring body surface used by magnetic-control sputtering ring pieces. A lathe is adopted as a machining tool, the ring piece performs circular motion, the cutter with an idler wheel performs axial rectilinear motion, the ring piece is surrounded to be circular with plate blanks, and a manufacturing cutter which is adopted is a flexible cutter the idler wheel of which can perform straight reciprocating motion along axial direction. The cutter comprises a tool holder (2), a cutter arbor (4) and an idler wheel (5), wherein, the idler wheel (5) is arranged on the outer end of the cutter arbor (4), and the tool holder (2) and the cutter arbor (4) are in elastic fixing.

Description

Technical field: [0001] The invention relates to the surface treatment of a part required by semiconductor surface sputtering plating technology, and also belongs to the mechanical processing technology of nonferrous metals, in particular to a ring body surface flexible knurling method and cutter for magnetron sputtering rings. Background technique: [0002] Magnetron sputtering rings are used in the semiconductor industry and are important consumables used in conjunction with the target in semiconductor sputtering equipment. There are two main aspects of the market for rings: first, with the increase in the production and investment of new equipment by equipment manufacturers; second, equipment users need to update new rings due to wear and tear in semiconductor sputtering. The main materials for processing rings are tantalum, titanium, aluminum and other materials. With the continuous increase of the target market, the market for rings is also growing. Magnetron sputterin...

AI Technical Summary

Problems solved by technology

If the traditional rigid knurling tool is used for knurling, due to the circumferential runout of the ring body, the contact pressure between the knurling wheel and the ring body cannot be kept constant within a reasonable range during the entire knurling process, and even the knurling wheel and ring body cannot be guaranteed. The whole process of contact with the body, the result is often a huge difference in the depth of the knurling, and there are still large areas without rolling patterns, which cannot meet the production requirements

Therefore, the previous processing method is to increase the thickness of the ring body, and then turn it to obtain a round surface after rolling. The final thickness of the ring body is 3.175mm. If the turning allowance is left for the inner and outer surfaces, the slab will The thickness must be increased to at least 5.2mm, waste of material, complicated process, obvious

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