Grinding mat provided with groove structure for preventing grinding surface from falling off

A technology for grinding pads and grinding surfaces, which is applied in the field of grinding pads, can solve the problems of reducing grinding quality and grinding effect, and achieve the effects of increasing grinding effect, good grinding quality, and facilitating elimination

Inactive Publication Date: 2010-01-13
BESTAC ADVANCED MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the area of ​​the grinding area 12 of the outermost part of the conventional grinding pad 1 is small and has a sharp angle structure, so when performing the grinding process, not only the centrifugal force that needs to be borne is the largest, but also when the conventional grindin

Method used

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  • Grinding mat provided with groove structure for preventing grinding surface from falling off
  • Grinding mat provided with groove structure for preventing grinding surface from falling off
  • Grinding mat provided with groove structure for preventing grinding surface from falling off

Examples

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Example Embodiment

[0012] Figure 2A A schematic diagram showing a polishing pad with a groove structure to prevent the polishing surface from falling off according to the first embodiment of the present invention; Figure 2B It shows a partial three-dimensional schematic diagram of a polishing pad with a groove structure to prevent the polishing surface from falling off according to the first embodiment of the present invention. Match reference Figure 2A with Figure 2B , The polishing pad 2 includes: a substrate 21 and a polishing layer 22. The substrate 21 has a surface 211. The polishing layer 22 is disposed on the surface 211 and exposes part of the surface 211 of the periphery of the substrate 21. The polishing layer 22 has a plurality of first grooves 221 and a plurality of second grooves 222, and the first grooves 221 and the second grooves 222 intersect to define a plurality of polishing regions 223. The exposed part of the surface 211 of the periphery of the substrate 21 is located be...

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Abstract

The invention relates to a grinding mat provided with a groove structure for preventing a grinding surface from falling off, which comprises a base material and a grinding layer, wherein the base material is provided with a surface; the grinding layer is arranged on the surface and exposes the partial surface on the base material periphery; the grinding layer is provided with a plurality of first grooves and a plurality of second grooves, the first grooves intersect with the second grooves so as to define a plurality of grinding areas; and the exposed partial surface on the base material periphery is positioned between the first grooves, the second grooves and the grinding mat periphery. Therefore, the grinding mat can contain more grinding fluid and is favorable for eliminating grinding scraps. Moreover, the grinding layer has no sharp-angled structure and is not easy to fall off to become the scraps, so that the grinding mat can improve grinding quality and the grinding effect.

Description

technical field [0001] The invention relates to a polishing pad, in particular to a polishing pad with a groove structure for preventing the polishing surface from falling off. Background technique [0002] figure 1 A conventional polishing pad having grooves in XY directions is shown, and the conventional polishing pad 1 has a plurality of grooves 11, wherein the grooves 11 are perpendicular to each other. Other conventional polishing pads also have grooves of different shapes, but most of them are grooves in the XY direction or their variants, and the grooves are all made according to specific specifications during design. [0003] The cutting size of the conventional polishing pad 1 and the pattern of the grooves 11 will result in a relatively small polishing area 12 at the outermost boundary of the conventional polishing pad 1 due to geometrical design. Wherein, the grinding area 12 with a small area is mostly a sharp-edged structure, so it is easy to scratch the objec...

Claims

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Application Information

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IPC IPC(8): B24D13/14H01L21/304
Inventor 冯崇智刘玮得洪永璋王俊达姚伊蓬
Owner BESTAC ADVANCED MATERIAL
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