Grinding mat provided with groove structure for preventing grinding surface from falling off

Abstract

The invention relates to a grinding mat provided with a groove structure for preventing a grinding surface from falling off, which comprises a base material and a grinding layer, wherein the base material is provided with a surface; the grinding layer is arranged on the surface and exposes the partial surface on the base material periphery; the grinding layer is provided with a plurality of first grooves and a plurality of second grooves, the first grooves intersect with the second grooves so as to define a plurality of grinding areas; and the exposed partial surface on the base material periphery is positioned between the first grooves, the second grooves and the grinding mat periphery. Therefore, the grinding mat can contain more grinding fluid and is favorable for eliminating grinding scraps. Moreover, the grinding layer has no sharp-angled structure and is not easy to fall off to become the scraps, so that the grinding mat can improve grinding quality and the grinding effect.

Description

technical field [0001] The invention relates to a polishing pad, in particular to a polishing pad with a groove structure for preventing the polishing surface from falling off. Background technique [0002] figure 1 A conventional polishing pad having grooves in XY directions is shown, and the conventional polishing pad 1 has a plurality of grooves 11, wherein the grooves 11 are perpendicular to each other. Other conventional polishing pads also have grooves of different shapes, but most of them are grooves in the XY direction or their variants, and the grooves are all made according to specific specifications during design. [0003] The cutting size of the conventional polishing pad 1 and the pattern of the grooves 11 will result in a relatively small polishing area 12 at the outermost boundary of the conventional polishing pad 1 due to geometrical design. Wherein, the grinding area 12 with a small area is mostly a sharp-edged structure, so it is easy to scratch the objec...

AI Technical Summary

Problems solved by technology

However, the area of ​​the grinding area 12 of the outermost part of the conventional grinding pad 1 is small and has a sharp angle structure, so when performing the grinding process, not only the centrifugal force that needs to be borne is the largest, but also when the conventional grinding pad 1 is carried out horizontally When moving in the same direction, it will be subject to a large shear stress due to frictional contact with the object to be ground, and it will easily detach from the base material and become debris, thus reducing the grinding quality and grinding effect

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