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Substrates support table and substrates examination device with same

A technology for supporting tables and substrates, applied in the direction of optical testing flaws/defects, instruments, measuring devices, etc., can solve problems such as inspection errors

Inactive Publication Date: 2010-03-10
SFA ENG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If substrate G3 is severely sagged, then check FPD substrate 5 (see figure 1 ) inspection equipment (see figure 1 In the case of the station used in ), inspection errors may occur

Method used

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  • Substrates support table and substrates examination device with same
  • Substrates support table and substrates examination device with same
  • Substrates support table and substrates examination device with same

Examples

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Embodiment Construction

[0061] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The aspects and features of the present invention and methods for achieving the aspects and features will become apparent by referring to the embodiments to be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. Matters defined in the description, such as detailed construction and elements, are merely provided to assist those skilled in the art in a comprehensive understanding of specific details of the invention, and the invention is defined only within the scope of the appended claims. Throughout the description of the invention, the same drawing reference numerals are used for the same elements throughout the various figures.

[0062] For reference, the substrates to be described below mean LCD (Liquid...

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PUM

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Abstract

A denting inspection apparatus is provided to extend the tracking range of auto focusing, and to examine effectively even when the flatness of a substrate is not uniform due to drooping according to enlargement of the substrate. A denting inspection apparatus includes a stage(20), at least one camera(10), an optical system transfer unit, at least one displacement sensor(30), and a control unit. The substrate of an object to inspect denting in the region of the tap mounted on one side is received in the stage. The camera photographs the denting inspection region of the substrate. The optical system transfer unit transfers the camera relative to the stage, being coupled with the camera. The displacement sensor is installed in front of the camera in the moving direction of the camera to measure the displacement of the substrate. The control unit controls the movement of the camera by pre-obtaining the flatness information of the denting inspection region of the substrate from the displacement sensor before reaching the region.

Description

[0001] This case is a divisional application of the invention patent application with application number 200710110868.7. technical field [0002] The present invention relates to a substrate supporting table and a substrate inspection apparatus having the substrate supporting table. More specifically, the present invention relates to a substrate supporting table and a substrate inspection apparatus having the substrate supporting table, which can improve productivity by improving inspection efficiency and reducing the amount of tact time, and by preventing Unnecessary peripheral devices are required, and work space and various losses are reduced by collectively performing dent inspection and crack inspection using a single inspection device. Background technique [0003] The substrate is a component of the image display device. The substrate includes a semiconductor substrate and a flat panel display (FlatPanel Display, FPD) substrate. The FPD substrate includes a Liquid C...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G01B11/30
CPCG01B11/306G01N21/8851G01N21/892G01N2021/8924
Inventor 崔裕灿洪旋珠朴珉镐
Owner SFA ENG CORP