Construction method of C-scan phase reversal image of ultrasonic scanning microscope

Abstract

The invention provides a construction method of a C-scan phase reversal image of an ultrasonic scanning microscope, which relates to the technical field of using the ultrasonic scanning microscope device for processing collected data. The construction method comprises the following steps: a. setting a related data gate for determining the detection region and the threshold voltage; b. scanning, transmitting ultrasonic waves, and carrying out position synchronous triggering for generating the ultrasonic waves; c. judging whether the positive peak voltage value and the negative peak voltage value of each point in the detected position of a measured target generate the phase reversal or not, and converting the peak results to the pixel gray-scale values of the constructed image; and d. outputting the corresponding gray-scale value of each point onto a screen for constructing the gray-scale image. The construction method has the beneficial effects that the constructed phase reversal imagecan detect the defects of lamination, air holes and the like in a device and overcome the disadvantages of high requirements of the prior art on the surface planeness and the placement of the measured target, inaccurate position of the constructed image, slow construction speed, inaccurate phase reversal judgment and the like.

Description

technical field [0001] The invention relates to the technical field of data processing collected by ultrasonic scanning microscope equipment, in particular to a method for constructing a C-scan phase-reversed image of an ultrasonic scanning microscope. Background technique [0002] With the increasing production scale and variety of electronic products, the degree of circuit integration and production automation has also increased accordingly. At the same time, the quality requirements for devices have also become higher and higher. , non-destructive testing of packaged devices is an indispensable process, and ultrasonic scanning microscopes can detect defects such as delaminations, voids, and cracks that are not sensitive to X-ray inspections and are more and more widely used. Ultrasonic scanning microscope is a grating movement through the cooperation of the scanning axis and the stepping axis of the motion actuator. While the scanning axis is moving, it emits ultrasonic w...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for constructing a C-scanning phase-reversal image of an ultrasonic scanning microscope. The synchronous position of the grating scale is used to trigger the generation of ultrasonic waves, which solves the problem of inaccurate software trigger positions, and the constructed phase-reversal image can detect the inside of the device. Defects such as delamination and pores, the constructed image has the advantages of accurate position and high precision

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