Construction method of C-scan peak image of ultrasonic scanning microscope

Abstract

The invention provides a construction method of a C-scan peak image of an ultrasonic scanning microscope, which relates to the technical field of using the ultrasonic scanning microscope device for processing collected data. The construction method comprises the following steps: a. setting a C-scan data gate for determining the detection region and the threshold voltage; b. scanning and adopting the synchronous position triggering of a grating ruler for generating ultrasonic waves; c. carrying out data treatment on the peak voltage at the point, and converting the final peak result to the pixel gray-scale value of the constructed image; and d. outputting the corresponding pixel gray-scale value of each point onto a screen for constructing the gray-scale image. The construction method solves the disadvantage of inaccurate triggering position of software in the prior art and has the advantages of accurate position of the constructed image, high precision, clear image and the like. If the front surface following technology is adopted, then the construction method can solve the disadvantages of higher requirements of the algorithm on the surface planeness and the placement of a measured target; and the method of using hardware for judging peaks and only returning positive and negative peaks is adopted, then the construction method can reduce data volume of software treatment and increase the image construction speed.

Description

technical field [0001] The invention relates to the technical field of data processing collected by ultrasonic scanning microscope equipment, in particular to a method for constructing a C-scan peak image. Background technique [0002] With the increasing production scale and variety of electronic products, the degree of circuit integration and production automation has also increased accordingly. At the same time, the quality requirements for devices have also become higher and higher. , non-destructive testing of packaged devices is an indispensable process, and ultrasonic scanning microscopes can detect defects such as delaminations, voids, and cracks that are not sensitive to X-ray inspections and are more and more widely used. Ultrasonic scanning microscope is a grating movement through the cooperation of the scanning axis and the stepping axis of the motion actuator. While the scanning axis is moving, it emits ultrasonic waves and receives reflected echoes, converts th...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for constructing a C-scan peak image of an ultrasonic scanning microscope, which solves the disadvantage of inaccurate software trigger positions in the prior art, and the constructed C-scan image is clear, which can reflect the internal characteristics of the device in detail, and has the advantages of constructing Accurate image position, high precision, clear image, etc.

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