Construction method of C scanning TOF image of ultrasonic scanning microscope

Abstract

The invention provides a construction method of a C scanning TOF image of an ultrasonic scanning microscope, which relates to the technical field of ultrasonic scanning microscope equipment for processing the acquired data. The method comprises the following steps: a. setting a C scanning data gate to determine a detection area and threshold voltage; b. scanning and emitting ultrasonic waves, and using a grating ruler for synchronous position triggering to generate the ultrasonic waves to extract the time of each point in the data gate area when a return signal reaches a peak value (i.e. peak time); and c. carrying out data processing on the peak time of the point; and d. outputting a gray value corresponding to each point onto a screen to construct a gray image. The invention overcomes the defect that the software triggering position is inaccurate in the prior art, has the advantages of accurate position of the constructed image, high precision and the like, can overcome the defects that the algorithm has higher requirements on the surface flatness and arrangement of a measured object and the obtained peak time is inaccurate, improves the construction speed of the image, and obtains a clear constructed scanning image which can reflect the characteristic of the depth direction of a device in detail.

Description

technical field [0001] The invention relates to the technical field of data processing collected by ultrasonic scanning microscope equipment, in particular to a C-scan TOF image construction method. Background technique [0002] With the increasing production scale and variety of electronic products, the degree of circuit integration and production automation has also increased accordingly. At the same time, the quality requirements for devices have also become higher and higher. , non-destructive testing of packaged devices is an indispensable process, and ultrasonic scanning microscopes can detect defects such as delaminations, voids, and cracks that are not sensitive to X-ray inspections and are more and more widely used. Ultrasonic scanning microscope is a grating movement through the cooperation of the scanning axis and the stepping axis of the motion actuator. While the scanning axis is moving, it emits ultrasonic waves and receives reflected echoes, converts the analo...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for constructing a C-scan TOF image of an ultrasonic scanning microscope. The synchronous position of the grating ruler is used to trigger the generation of ultrasonic waves, which solves the shortcomings of inaccurate software trigger positions in the prior art, and has the advantages of accurate and high-precision image construction. advantage

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